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On line online film thickness detection solution

2026-06-27 16:45:50 Lucy

Introduction

UNICORN Technology Co., Ltd. was established in November 2012 and registered in Hong Kong, China. It is a subsidiary of Yiying Technology (Shanghai) Co., Ltd.

Yiying Technology (Shanghai) Co., Ltd. mainly provides various precision imported processes and measurement equipment for semiconductor, new energy enterprises, universities, and research and development centers. Provide one-on-one sales services, technical support, spare parts management, and consulting services.

What is Parylene?

Poly para xylylene (abbreviated as "parylene") is a high molecular weight polymer, also known as "poly para xylylene" in ChinaPerry Lin.
Parylene is a new type of conformal coating material developed and applied by Union Carbide Co. in the mid-1960s in the United States. Depending on the molecular structure, Parylene can be divided into various types such as N, C, D, HT, etc.

Basic characteristics of commonly used Parylene materials

(1) Parylene C powder is waterproof and has 30% stronger corrosion resistance than N powder. Its voltage resistance is lower than that of N powder, and C powder is suitable for PCBA
(2) Pairuilin N powder has high voltage resistance, high waterproofing, and lower anti-corrosion performance than C powder. It is suitable for micro motors such as silicon steel sheets
(3) Perry Lin HT-2 powder has improved its waterproof, anti-corrosion, and voltage resistance properties by about 15% compared to C-N powder. It is an improvement on the basis of C-N powder and has replaced the production use of C-N powder
(4) Parylene (F-VT4) - (F-AF4) powder, with strong UV protection, is used for outdoor products. The material cost is relatively high, and customers are currently unable to accept the unit price

What is Parylene C?

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Parylene C is a commercially valuable member of the series. It is made from the same monomer, except that one aromatic hydrocarbon hydrogen atom has been replaced with a chlorine atom.

Combining excellent dielectric and physical mechanical properties,Has low permeability to humid and corrosive gases.

Can provide true pinhole free overlay isolation. Meets the US military standard MIL-46058C and is a material for coating important circuit boards.

Parylene characteristics

Parylene deposition can be prepared by polymerizing active monomer gases onto the surface of an object, unlike the usual method of preparing through liquid coating.

Its active molecules generate a completely coated polymer film on the surface of the object being coated, which can be coated onto any shape of surface without creating blind spots, including sharp edges, crevices, and fine pinholes,

The film thickness can be uniformly coated on the parts of the product, with a film thickness ranging from 1um to 50um.

Parylene industry applications

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Introduction to Parylene Process Technology

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Parylene adopts chemical vapor deposition (CVD) process.

The accumulation process is divided into three steps:
Under vacuum conditions, heat and vaporize the solid powder of di para xylene dimer (dimer) at 120 ℃;

2. Cracking the gaseous dimer of para xylene into the active monomer para xylene at 650 ℃;

3. Gaseous active monomers are deposited and polymerized into thin films of poly para xylene at room temperature.

Three elements of production control for Parylene process equipment

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Three characteristics of poor Parylene products

The leader in the Parylene industry

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Japanese polymer materials company KISCO announced on January 7th the acquisition of American specialty coating company Specialty Coating Systems (SCS).

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Common problems and supervision in the production process

Question:

1 . Insufficient purity of material decomposition during the coating process (due to pressure control in the cylinder, resulting in poor thickness uniformity)
2. The material stays in the cylinder body for too long, causing the product to turn white
3. The cylinder swing of the product involves the gas-phase flow of raw materials, which can also affect the thickness uniformity of the product
During the production process, the cylinder is blocked and the film thickness of the product does not increase
5. The structural design of the wind deflector is very important. Unreasonable design may result in residual materials and blockage of the feeding pipe

Temperature, pressure control, thickness online monitoring

The product appears white and blue, with poor adhesion and uneven film thickness

Filmetrics - Advantages of Online Measurement

Non destructive, non-contact measurement, warning

1. Production process monitoring - real-time feedback of production data to improve product quality
2. Improve production efficiency - set production indicators and provide alarm prompts
3. Save material costs - reduce product specification tolerances, visible material savings
4. Reduce labor costs - direct online data supervision in the monitoring room
5. Monitoring of cylinder blockage and stoppage - saving materials and manually rescuing defect rates
6. Set precise thickness range for the product
7. Facilitate the adjustment of different product processes

Filmetrics - Schematic diagram of production line layout for online monitoring and measurement of production processes

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