In SiC semiconductors Film thickness measurement solution Younikon Technology Co., Ltd
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01 Overview of SiC Semiconductor Materials 02 Advantages of SiC materials 03 Types of SiC devices 04 SiC Semiconductor Applications 05 SiC semiconductor manufacturer 06 Measurement requirements for SiC semiconductors 01 With the maturity of the development of first and second generation semiconductor materials, Si power devices currently in large-scale use have reached their performance bottleneck. The improvement of Si power devices' performance in terms of operating frequency, power, heat resistance, energy efficiency, resistance to harsh environments, and miniaturization is facing insurmountable bottlenecks. More and more fields of modern technology require third-generation semiconductors with high frequency, high power, high temperature resistance, and good chemical stability. As an excellent representative of third-generation semiconductors, SiC (Silcon carbide) is receiving increasing attention from people. As a new type of semiconductor material, SiC has become an important semiconductor material for manufacturing short wavelength optoelectronic devices, high-temperature devices, radiation resistant devices, and high-power/high cost electronic devices due to its excellent physical, chemical, and electrical properties. Especially when applied under harsh conditions, the characteristics of SiC devices far exceed those of Si and GaAs devices. Therefore, SiC devices and various sensors have gradually become one of the key components, playing an increasingly important role. Since the 1980s, especially since the first SiC substrate wafer entered the market in 1989, SiC devices and circuits have experienced rapid development. In certain fields, such as light-emitting diodes, high-frequency high-power and high-voltage devices, SiC devices have been widely used in commercial applications. 02 Sic silicon carbide materials generally have the following advantages: 1. High impact field strength 2. high thermal conductivity 3. Strong high-temperature antioxidant capacity 4. Good wear resistance 5. Stable chemical properties 6. High saturation and electron drift rate Comparison of Relevant Parameters between SiC, Si, and GaAs 03 Silicon carbide devices mainly include power diodes and power switching transistors. Power diode Power switch tube 04 Silicon carbide semiconductor devices are particularly suitable for applications that require high efficiency or temperature due to their high-frequency, high-efficiency, and high-temperature characteristics. Widely applicable to solar inverters, vehicle power supplies, new energy vehicle motor controllers UPS、 Charging stations, power sources, and other related fields. 05 Foreign manufacturers Domestic manufacturers Infineon Germany Zhuzhou CRRC Times Semiconductor Cree Corporation, USA Qidi New Materials (Wuhu) GE Wuxi Huarun Shanghua Technology Roma Corporation of Japan ... 06 Common types of film thickness testing in SiC semiconductor process measurement: Α-Si (1000-20000A) SiNx (100-4000A) SiO2 (30-10000A) USG(1000-20000A) C membrane (100-2000A) BPSG (1000-20000A) POLY (1000A-20000A) Match product model F50-UV F54-UV measurement parameters measurement data C on SiC POLY on SiC SiO2 on SiC SiNx on SiC USG on SiC BPSG on SiC The author of this article Hu Shudong east China sales manager I have been working in the thin film measurement industry for over ten years and have rich experience in providing solutions for thin film measurement. The previously difficult problem of measuring channel morphology and depth in the microfluidic chip industry has been solved. I will mount a long wind some day and break the heavy waves, and set my cloudy sail straight and bridge the deep, deep sea We have been deeply involved in the thin film measurement industry for over ten years. No matter what problems you have in thin film measurement, our technical experts can provide you with valuable advice or solutions. Welcome to call, we are pleased to discuss your application issues with you. Consultation hotline: 400-186-8882 E-mail info@unicorn-tech.com Younikon Technology Co., Ltd Yiying Technology (Shanghai) Co., Ltd
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