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The Filmetrics F40 is a compact add-on spectroscopic reflectometry thin film measurement system designed to convert standard laboratory optical microscopes into precise micro-area film characterization tools, uniquely tailored for tiny patterned structures, micro MEMS features and localized coating inspection where large measurement spots cannot target sub-millimeter device regionsFilmetrics. Delivering a minimum 1 μm measurement spot via matched microscope objective optics and objective-by-objective spectral calibration, it eliminates positioning errors and achieves accurate absolute reflectance spectrum analysis to extract film thickness, refractive index (n), extinction coefficient (k) and surface reflectance within one second per test point.
A complete series of wavelength configurable models meets diverse film thickness demands: standard F40 (400–850 nm, 20 nm–40 μm), F40-UV (190–1100 nm, 4 nm–40 μm) for ultra-thin gate dielectrics, F40-UVX full UV-NIR, F40-EXR extended visible-NIR, F40-NIR for thick polymer passivation, and F40-XT for coatings up to 350 μm thick. The integrated CCD live video camera streams real-time sample imaging on PC screens, enabling visual confirmation of the exact measurement spot on complex patterned substrates, curved surfaces and small fragment samples.
Supplied with universal C-mount adapter compatible with most mainstream optical microscopes, the F40 package includes complete calibration accessories: background baseline reference, BK7 reflectance standard and SiO₂ thickness calibration wafer for routine system verificationFilmetrics. The bundled FILMeasure software hosts a built-in database of over 130 pre-calibrated material models covering SiO₂, SiN, photoresist, polyimide, ITO and parylene, supporting single/multi-layer stack fitting, offline spectrum simulation, batch data logging and customizable report export functions.
This official brochure details full spectrometer optical parameters, interchangeable objective lens spot size options, standardized baseline calibration procedures and cross-industry application solutions for semiconductor lithography & deposition monitoring, LCD/OLED polyimide & cell gap testing, MEMS silicon membrane thin film inspection, biomedical implant polymer coatings and optical anti-reflection micro-coatings, with one-click PDF download available for laboratory equipment evaluation and micro-area thin film process characterization.