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Film Sense FS-8 Ellipsometer Product Brochure

Brief Description ：: Download official product brochure for Film Sense 4th-gen FS-8 multi-wavelength ellipsometer with 8 LED wavelengths covering 370–950 nm, featuring motion-free detector, 0.0004 nm thickness precision and 1-second fast measurement. It measures film thickness, refractive index n & extinction coefficient k, supports ex-situ lab testing, in-situ ALD monitoring and automated wafer mapping. This brochure includes full optical specs, modular accessories, browser-based software workflow and application cases for semiconductors, optical coatings, OLED, photovoltaics and biosensor R&D.

File version ：: V1.0.1

File type ：: PDF

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The Film Sense FS-8 is the fourth-generation patented multi-wavelength ellipsometry platform engineered for compact, low-cost and ultra-stable thin film optical characterization. Equipped with eight long-lifetime LED light sources spanning 370 nm to 950 nm and a proprietary detector with zero moving optical components, the system eliminates mechanical vibration drift and delivers exceptional repeatability with thickness precision up to 0.0004 nm under standard 1-second measurement mode.

It covers transparent thin films from 0 up to 5 μm, absorbing metal layers below 50 nm and up to 5-layer complex film stacks, simultaneously extracting thickness, refractive index (n) and extinction coefficient (k) without extra auxiliary equipment. The motorized polarizer enables auto calibration and zone-averaged testing to boost data accuracy; fast sampling speed at 1.7 ms in fast mode makes it ideal for real-time in-situ monitoring of ALD, PVD and spin-coating processes.

All hardware adopts miniaturized split-source-detector layout for easy bench integration or vacuum chamber installation, powered by 12V low-voltage supply and simple Ethernet communication. The built-in web-browser software features Model Builder automatic fitting engine, multi-sample n&k solving algorithms, batch mapping recipe editing and complete data export functions. This brochure details full dimension parameters, optional liquid cell, XY mapping stage and heating/cooling fixtures, alongside mass application solutions for semiconductor gate dielectrics, anti-reflection optical coatings, OLED functional layers, photovoltaic passivation films and biocompatible sensor coatings, with one-click PDF download available for lab process optimization and production quality control.