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HORIBA UVISEL Plus Ellipsometer Product Brochure

Brief Description ：: Download official product brochure for HORIBA UVISEL Plus phase modulated spectroscopic ellipsometer equipped with FastAcq high-speed acquisition technology, covering full FUV-NIR spectrum 190–2100 nm. It delivers ultra-high precision thickness, refractive index and optical constant measurement with 50 μm micro-spot, supporting film mapping, in-situ kinetic monitoring and multi-layer film modeling. This brochure contains full optical specs, modular accessories, AutoSoft analysis software tutorials and application cases for semiconductors, optical coatings, MEMS and advanced material R&D.

File version ：: V1.0.1

File type ：: PDF

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The HORIBA UVISEL Plus is a benchmark phase-modulated spectroscopic ellipsometer built on over 25 years of HORIBA ellipsometry expertise, designed for high-accuracy characterization of ultra-thin films, complex multi-layer stacks and material optical constants across 190 nm far-ultraviolet to 2100 nm near-infrared spectral rangeHORIBA. Adopting 50 kHz high-frequency phase modulation without rotating mechanical components, it achieves outstanding signal-to-noise ratio and stable Ψ/Δ measurement across all sample types, immune to minor environmental vibration.

Equipped with proprietary FastAcq double-modulation acquisition technology, the system boosts testing speed by 1.5× and detection sensitivity by 2×; full-spectrum high-resolution scanning finishes within 3 minutes, with a maximum data collection rate of 50 ms per point ideal for real-time in-situ reaction and kinetic monitoringHORIBA. A 50 μm micro-spot optical module enables precise measurement on patterned wafers and tiny device structures, while fully modular hardware supports flexible upgrades including automated XY mapping stage, liquid sample cell, heating/cooling chamber and vacuum environmental enclosure to match diverse research and production demands.

The bundled AutoSoft analysis software integrates a massive built-in material database, intelligent Multi-Guess fitting algorithm, one-click automated mapping and customized test recipe editing, simplifying complex multi-layer film modeling for both novice operators and veteran researchers. This official brochure details complete optical configuration, hardware parameter indexes, all optional functional accessories, standardized calibration workflows and abundant application solutions covering semiconductor gate oxides, photoresist layers, optical anti-reflection coatings, MEMS thin films, polymer substrates and biomedical functional films, serving academic labs and industrial process quality control with downloadable PDF resources for full parameter reference and test scheme design.