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The KLA iNano is a space-saving, user-friendly compact nanoindentation system engineered for quantitative nanoscale mechanical characterization of thin films, functional coatings and micro-sized material specimens. Powered by the integrated InForce 50 electromagnetic actuator, it delivers up to 50 mN load and 50 μm displacement range with nanometer-level displacement resolution, capable of testing materials spanning ultra-soft hydrogels, polymers to hard ceramic and metallic coatings.
This brochure details all core hardware configurations including integrated vibration-isolated gantry, high-speed iQWave2 data acquisition electronics, digital zoom optical microscope and magnetic quick-change sample holders. It introduces expandable modular options: continuous stiffness measurement (CSM), AccuFilm thin-film correction, NanoBlitz 3D/4D mechanical mapping, dynamic DMA testing, scratch-wear module and high-temperature heating stage. The intuitive InView software suite with pre-built standardized test templates, automatic tip calibration and comprehensive data reporting tools is fully explained. Rich application cases cover semiconductor packaging films, MEMS devices, battery electrode coatings, optical glass, biomedical materials and industrial protective coatings, meeting the mechanical testing demands of university research labs and manufacturing quality control. One-click PDF download is available for full parameter reference and test scheme design.