FILMETRICS Film Thickness Gauge - Application in Optoelectronic Integrated Chip Technology

2026-06-27 16:45:51 admin

Filmetrics Film Thickness Gauge - Application in Fiber Optic Communication


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At present, optoelectronic integrated chip technology is in a period of rapid development. A large amount of resources have been invested globally in the research and development of optoelectronic devices, with progress and breakthroughs in basic scientific issues, key technologies, demonstration applications, and industrial promotion.

Optoelectronic integrated chip technology is a new technology that integrates optoelectronic materials and functional microstructures on a single chip to achieve system functionality. The development of optoelectronic integrated chip technology similar to microelectronic integrated circuits is a milestone transformation that optoelectronic device technology is facing.

Optoelectronic integrated chip technology has outstanding advantages such as low power consumption, high speed, high reliability, and small size. It will play an increasingly important role in key areas such as optical transmission, optical information processing and exchange, optical access, and optical wireless integration. It is the only way to break through the two major technological bottlenecks of speed and energy consumption faced by information networks. Optoelectronic integrated chip technology also has broad application prospects in sensing, computing, biology, medicine, agriculture and other fields.


Optoelectronic integrated chip technology includes epitaxial growth of optoelectronic chips, design and fabrication of optoelectronic chips, process development and packaging of optoelectronic chips, and so on. Especially in the process of manufacturing optoelectronic integrated chips, it is necessary to strictly control the thickness of SiOx, SiNx and other film layers in order to achieve the desired process effect.

FilmetricsF20 白光干涉膜厚测量仪As a high-performance device with high precision, fast testing speed, and easy operation, it can conveniently and quickly measure the thickness of these film layers.

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The practical application of Filmetrics F20 white light interference film thickness measuring instrument in optical communication measurement:

(1) Measure the thickness of SiOx film layer

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(2) Measure the thickness of SiNx film layer

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