The measurement of surface morphology can usually be divided into two types: contact and non-contact. In various application fields, these two methods have complementarity and are different from each other. Therefore, in practical applications and machine selection, it is necessary to determine according to the specific situation. It is recommended to consult relevant technical engineers first.
This issue mainly discusses contact surface morphology measurement instruments:step profiler
According to the different sensors used, contact type step measurement can be divided intoinductive、piezoelectricandphotoelectricThree types.
When the stylus of the stair step meter lightly slides over the surface of the object being measured, the small peaks and valleys on the surface of the object being touched will cause the stylus to move up and down while sliding. Therefore, the surface contour is to some extent reflected by the movement of the stylus.
The KLA stair step meter promoted by NikonD series stair step meterandP series stair step meterFor example, let's take a brief look:
Touchpin sensor technology:Height resolution below 0.1 nanometers
Optical lever sensor: D series stair step meter
Capacitive Sensor (LVDC): P-series Stepper
All KLA series step gauge probes are made of diamond and have stable reliability
Height of medical stent steps; Depth of drug storage
ITO film step height; 20 to 200 nm step
solar cell
Etching process
LED Gallium Nitride Epitaxial Defect Detection
Solar panel morphology
Thin morphology of silicon wafer
Rounded corner test
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