The principle and application of ellipsometers
What is an ellipsometer/ellipsometer?
An ellipsometer is an optical measuring instrument used to detect the thickness of thin films, optical constants, and the microstructure of materials.
The basic principle of an ellipsometer
The parameters of films or interfaces are measured by using polarized light. The parameters of the sample are obtained by measuring the changes in the polarization state of the reflected (or transmitted) light of the sample under test. Taking a multi-wavelength ellipsometer provided by our company, Unicom Technology Co., LTD., as an example, let's briefly introduce the functions of the ellipsometer.
This model of Film Sense FS-1 ellipsometer adopts a long-life LED light source and a non-moving component ellipsometer detector, enabling film measurement in a compact and easy-to-operate ellipsometer. For most transparent films with a thickness of 0 to 1000 nm, accurate data can be obtained in just one second of measurement. It can also measure the optical constants and other thin film properties of most samples.
The Film Sense FS-1 multi-wavelength ellipsometer is a multi-wavelength ellipsometer with functions, and its price is only at the medium level of single-wavelength ellipsometers and spectral ellipsometers. FS-1 can be applied in many fields such as research laboratories, clean rooms, in-situ process chambers, and industrial quality control.
Application of ellipsometer
Due to its high measurement accuracy, suitability for ultra-thin films, non-contact with the sample, no damage to the sample and no need for vacuum, the ellipsometer has become a powerful measuring instrument. Ellipsometers/ellipsometers are now widely used in research, development and manufacturing processes in fields such as materials, physics, chemistry, biology and medicine.
Measurable materials: semiconductors, dielectric materials, organic polymer materials, metal oxides, multilayer film substances and graphene, etc.
WeChat Official
Support
