In the fields of precision measurement and high-end research and development, small environmental vibrations are often the "invisible killer" that affects data accuracy and equipment performance. Especially in cutting-edge industries such as semiconductor manufacturing, materials science, and biomedical research, there is a high demand for stability in experimental environments. How to effectively isolate vibration interference from the ground, internal equipment, and surrounding areas has become the key to improving measurement accuracy. Today, we will focus on introducingHERZ damping tableIts unique six degree of freedom full dimensional vibration isolation technology provides an unprecedented stable environment for ultra precision instruments.
Many high-precision and cutting-edge devices, such as scanning electron microscopes (SEM), transmission electron microscopes (TEM), atomic force microscopes (AFM), white light interferometric profilometers, etc., have resolutions up to the nanometer or even sub nanometer level. Even tiny vibrations that are imperceptible to humans can cause imaging blur and measurement data drift, seriously affecting scientific research results and production quality. The traditional passive vibration reduction method has limitations such as low-frequency resonance and slow response, making it difficult to meet the stringent requirements of top equipment.
Simply put, spatial vibrations come from six directions: three translational directions (up and down, left and right, front and back) and three rotational directions. Conventional vibration reduction systems may only suppress in certain directions. Advanced vibration reduction platforms, such as HERZ's AVI series, adopt innovative active vibration isolation technology, which can simultaneously detect and dynamically counteract the vibration input of these six degrees of freedom. The core of it lies in the feedback loop composed of internal piezoelectric sensors and drivers, which can generate real-time forces equal in magnitude and opposite in direction to the interference vibration, thereby achieving full dimensional vibration elimination from the source.
Wide isolation frequency range: Active isolation as low as 1Hz, and even compatible with systems starting from 0.5Hz, solving difficult to handle low-frequency ground vibration problems.
Excellent isolation effect: In the frequency range exceeding 10Hz, the vibration transmission rate can be lower than -35dB, which means that more than 97% of the vibration is effectively isolated.
Extremely fast response and recovery: The system response time is as short as 5-20 milliseconds, and the vibration recovery time is less than 10 milliseconds, ensuring that the equipment quickly returns to a stable state after being disturbed.
High load and modular design: Built with modularity, the load-bearing capacity can be flexibly expanded by adding modules. For example, the AVI-600 series can support up to 9000 pounds and is suitable for various devices ranging from desktop profilometers to large electron microscopes.
Electron microscope: Provides support for SEM and TEM from brands such as ZEISS, significantly improving the resolution and stability of high magnification imaging.
Lithography and metrology equipment: ensuring the positioning accuracy of exposure machines and various high-precision metrology equipment.
Surface morphology analyzer: creates an ideal testing environment for devices such as KLA Profilm3D white light interference profilometer, ensuring measurement accuracy at the sub nanometer level (such as 0.1nm repeatability).
Scanning probe microscope: provides a stable and reliable operating platform for AFM, UHV-SPM, and other instruments.
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