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How to effectively reduce vibration interference in the application of precision instrument shock absorbers?

2026-06-27 16:45:51 优尼康-MKT

In high-precision fields such as precision measurement, semiconductor testing, and nanotechnology, even small environmental vibrations can have a significant impact on instrument performance and data accuracy. The application of precision instrument shock absorbers has become a key link in ensuring the stable operation of instruments and improving measurement reliability. This article will explore the sources of vibration interference, the working principle of shock absorbers, and combine with the advanced shock absorber solution represented by Younikon Technology Co., Ltd. (Yiying Technology) to analyze how to use professional shock absorbersShock absorption table applicationTo effectively isolate vibrations and safeguard scientific research and production.

1、 Vibration interference: the 'invisible killer' of precision measurement

The vibration sources in laboratories or production workshops are widespread, such as ground vibration, personnel movement, equipment operation (such as air conditioning, pumps), traffic, and even sound waves. These vibration frequencies may range from below 1Hz to several hundred Hz, and are transmitted to precision instruments such as scanning electron microscopes (SEM), transmission electron microscopes (TEM), atomic force microscopes (AFM), white light interferometric profilometers, etc. through ground-based or airborne transmission. This interference can cause image blurring, measurement data drift, and resolution degradation, directly affecting the accuracy and repeatability of experimental results.

2、 Principle of Shock Absorber Platform: From Passive Isolation to Active Elimination

Traditional passive shock absorbers mainly rely on materials such as rubber, airbags, or springs to absorb high-frequency vibrations, but their isolation effect for low-frequency vibrations (especially below 10Hz) is limited, and there may be resonance risks. The application of modern precision instrument shock absorbers increasingly adopts active vibration isolation technology.

For example, in the solution jointly developed by Unicon Technology Co., Ltd., the core active vibration isolation module (such as the technology used in Herz brand shock absorbers from Japan) is equipped with piezoelectric sensors and drivers. The system continuously monitors vibration inputs from six spatial directions (three translations and three rotations) and generates a force of equal magnitude and opposite direction in real-time through the controller to counteract them. This active feedback control technology can effectively suppress low-frequency vibrations starting from 0.5Hz or 1Hz without low-frequency resonance problems, and the response time can be as short as 5-20 milliseconds.

3、 Key Performance and Technical Advantages of Shock Absorber Platform

An efficient shock absorption system needs to possess multiple characteristics to ensure wide applicability and stable performance. In the practical application of shock absorbers, the following aspects are particularly important:

Broadband isolation and fast response: Excellent systems can cover a wide range from ultra-low frequencies (such as 0.5Hz) to high frequencies (>200Hz). Active mode handles low-frequency vibrations, while passive mode handles high-frequency vibrations, achieving full frequency coverage. The fast response time ensures the immediate elimination of vibration.
High stability and modular design: The system should be able to operate continuously without faults for a long time. Modular design allows for flexible configuration based on the size, weight, and isolation requirements of the instrument. For example, for load-bearing requirements, expansion can be achieved by increasing the number of modules, and the maximum load-bearing capacity can reach a higher level to meet different needs from desktop AFM to large TEM.
Easy to integrate and maintain: The ideal shock absorber platform is easy to install, without the need for complex pneumatic pipelines or long-term calibration settings. The ultra-thin design makes it easy to integrate into the bottom of existing equipment, without changing the overall contour of the instrument, and does not require special maintenance on a daily basis.

优尼康科技有限公司（翌颖科技）

4、 Application scenarios of shock absorbers in different precision instruments

The application of precision instrument shock absorbers has penetrated into many cutting-edge scientific research and industrial fields:

Electron microscopy (SEM/TEM): This is one of the most classic applications of shock absorbers. Low frequency vibration can directly cause image shake at high magnification. By adopting a customized active vibration isolation platform (such as the UT-1000A solution), image resolution and stability can be significantly improved, helping users obtain clearer microscopic world images.
Lithography and metrology equipment: In semiconductor manufacturing, lithography machines, electron beam exposure (EBL) equipment, and high-precision metrology equipment are extremely sensitive to vibrations. The shock absorber can isolate environmental interference, ensuring exposure accuracy and measurement repeatability.
Scanning probe microscopy (SPM/AFM): including atomic force microscopy, scanning tunneling microscopy, etc. The interaction between the probe and the sample has extremely low tolerance for vibration noise, and the active damping platform can provide the necessary quiet environment for these nanoscale measurements.
Optical profilometers and interferometers, such as white light interferometers and laser interferometers, have measurement accuracy up to sub nanometer level. The shock absorber can effectively suppress phase noise caused by vibration, ensuring the accuracy of surface morphology and film thickness measurement.
Spectral measurement and precision optical platform: Precision optical systems such as Raman spectroscopy and fluorescence spectroscopy also require stable platforms to avoid signal fluctuations.

5、 How to choose a suitable shock absorber platform?

As a service provider deeply rooted in the field of precision measurement for many years, Unicon Technology Co., Ltd. (Yiying Technology) not only acts as an agent for advanced shock absorption equipment, but also provides customized solutions based on a deep understanding of customer application scenarios. When choosing a shock absorber platform, it is recommended to pay attention to the following points:

Clarify instrument requirements: Firstly, analyze the sensitive frequency range of the instrument to vibration, its own weight, and size.
Assessing environmental vibrations: Understanding the typical vibration spectrum of the installation site can help select a system with an appropriate isolation frequency starting point.
Considering scalability: Modular and scalable systems have greater investment protection value for potential future upgrades or replacements of heavier equipment.
Professional service support: It is crucial to choose a full-service provider that can provide the entire process from solution design, installation and debugging to after-sales technical support.

Unicon (Yiying Technology) integrates professional shock absorber platform technologies such as HERZ (a Japanese brand), and can provide targeted shock absorber solution design and integration services based on customers' specific instruments (such as FEI, Zeiss, Hitachi and other brand electron microscopes) and laboratory conditions.

Conclusion

In the pursuit of ultimate precision and reliability at the forefront of technology, environmental vibration control is no longer an option, but a necessity. By scientifically evaluating and selecting suitable precision instrument shock absorbers for application, a solid "quiet barrier" can be built for valuable precision instruments, significantly improving equipment utilization and the quality of scientific research output. Younikon Technology Co., Ltd. (Yiying Technology) is committed to providing professional equipment and technical services to help users in various fields effectively reduce vibration interference, safeguard the stability and efficiency of precision measurement and research and development processes.

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