By 2026, with the continuous emergence of new materials and new processes, higher requirements will be put forward for the accuracy, functionality and stability of profilometers. This article will sort out the core points for you when purchasing a high-precision profilometer, helping you make the right choice in the complex market.
Sample characteristics: Is your sample transparent or opaque? Is it hard metal or glass, or soft polymer or biomaterial? For the latter, if a contact-type step meter is chosen, it may damage the surface of the sample. At this point, a non-contact optical profilometer would be a more reliable choice. The KLA Profile 3D optical profilometer provided by Unicom Technology Co., LTD. (Yiying Technology) adopts the principle of white light interference and has a vertical resolution of sub-nanometer level, making it highly suitable for non-destructive testing of sensitive materials.
Test parameters: What data are you most concerned about? Is it the height of the steps, the thickness of the film, or the surface roughness and three-dimensional morphology? Different profilometers have different focuses. Some are good at measuring microscopic contours, while others are more suitable for analyzing the flatness of large areas. Clarifying the core requirements can effectively narrow down the screening scope.
Resolution: It refers to the minimum height difference that the instrument can distinguish. For most precision machining and semiconductor applications, sub-nanometer resolution has become the norm.
Repeatability: This refers to the consistency of the results when the same position is measured multiple times under the same conditions. A highly reliable profilometer brand will clearly provide RMS (Root mean square) repeatability data in the parameter table. For instance, the RMS repeatability of the WLI mode of KLA Profilm3D is 1.0nm, and that of the PSI mode can even reach 0.1nm. This indicates that the stability of its measurement results is quite high.
Accuracy: It refers to the degree of closeness between the measured value and the true value. It is usually expressed as a percentage or absolute value. For instance, the step height accuracy of KLA Profilm3D is 0.7%. This data can help you determine the credibility of the measurement results.
Operation interface: Is the software intuitive and easy to use? Can the operators get the hang of it quickly? Complex operation procedures not only affect efficiency but also easily introduce human errors.
Data analysis capability: Can the software automatically calculate the roughness parameters you need (such as Ra, Rz, Rq, etc.)? Does it support relevant international standards? Can intuitive 2D/3D image reports be generated?
Function expansion: A good profilometer software should have a certain degree of flexibility, such as whether it supports large-area splicing measurement and whether it can customize analysis algorithms according to specific needs.
Brand background: Understand the brand's technological accumulation and market reputation. As a well-known brand in the field of semiconductor testing equipment, KLA's products are widely used in the industry, and its technical strength has been verified by the market.
Localization services: Even the most precise instruments are bound to encounter problems. Does the supplier have a localized service team? Can timely technical responses and training be provided? Unicon Technology Co., LTD. (Yiying Technology) has branches or offices in Hong Kong, Shanghai, Dongguan, Tianjin, Chengdu and Suzhou, forming a nationwide service network, which is crucial for ensuring the long-term stable operation of the equipment.
Solution capability: Professional suppliers do not merely sell equipment; they can also provide measurement solutions based on your specific process challenges. For instance, when your sample has a special curvature or needs to be tested in a specific environment, can they offer effective suggestions or integration solutions?
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