In the semiconductor manufacturing and testing process, probe stations play a crucial role in connecting the microscopic world with electrical measurements. However, as the manufacturing process advances towards the nanoscale, any subtle vibrations in the environment can become a "hidden killer" that affects measurement accuracy and yield. A high-performance machineProbe station shock absorber stationIt is the cornerstone for ensuring precise operation of the probe station and obtaining reliable data. This article will delve into how to choose the appropriate vibration control scheme for your semiconductor testing scenario, and take you to learn about the professional accumulation of Unicon Technology Co., Ltd. (Yiying Technology) in this field.
When conducting wafer level electrical testing on the probe station, its probes need to accurately contact micrometer or even nanometer level electrode points with the assistance of a microscope. If the equipment is disturbed by low-frequency vibrations from floor slabs, personnel movement, air conditioning systems, or passing vehicles, it can cause slight relative displacement between the probe and electrode points. This not only affects contact stability and causes measurement deviation, but also may damage expensive probe tips or wafer surfaces.
Ordinary passive vibration isolation systems often have limited isolation effects on low-frequency vibrations and have their own low-frequency resonance problems. Therefore, in scenarios such as semiconductor testing that require extremely high stability, it is particularly important to introduce an active probe stage shock absorber stage to actively eliminate destructive low-frequency vibrations from a physical perspective.
The HERZ active shock absorption system provided by Younikon Technology Co., Ltd. (Yiying Technology) is designed to solve this pain point. The core working principle of the system is that the built-in sensors monitor vibrations from six degrees of freedom (horizontal, vertical, and tilt directions) in real time. The controller processes the signals and drives the piezoelectric transducer to generate a force equal in magnitude and opposite in direction to the incoming vibration, thereby instantly canceling out vibration interference. This process can be completed within a few milliseconds, ensuring that the probe station is always in a stable state.
For precision instruments such as probe stations, HERZ AV I series or TS series products offer multiple options. For example, the compact TS series active shock absorber can be placed directly on the desktop, providing six degrees of freedom (0.7-100Hz) active isolation for a single probe stage or microscope. Its automatic horizontal adjustment function ensures that the platform is level even if the load center of gravity is offset, providing a stable operating environment for the operator. The data shows that this type of system can significantly reduce the vibration transmission rate beyond 10Hz to below 0.017 (-35dB).
There are various semiconductor testing scenarios, and the size, weight, and accuracy requirements of the probe station are different. Therefore, the selection of the shock absorber station for the probe station also needs to be tailored.
For analytical probe stations used in research and development or analytical laboratories, greater emphasis may be placed on flexibility and versatility. The HERZ TS series desktop active shock absorber is an ideal choice. It not only effectively isolates vibrations, but its LCD display panel can also monitor the vibration situation in the XYZ direction in real time, making stability "visible".
For the fully automated wafer probe station on the mass production line, the equipment has a large volume, high weight, and strict requirements for long-term reliability. At this point, the AVI-600 series active seismic protection system with modular design is more suitable. It can expand its load-bearing capacity by increasing the number of isolation modules, with a maximum load-bearing capacity of up to 9000 pounds (approximately 4082 kilograms), which is sufficient to support large equipment. Its active isolation frequency covers 1-200Hz, while passive isolation responds to high-frequency vibrations above 200Hz, forming a full frequency protection barrier. For example, a device weighing 3500 kilograms can be smoothly supported by four AVI-600 modules, effectively isolating low-frequency noise and ensuring image clarity and measurement stability during high magnification scanning.
Choosing a probe station shock absorber station not only depends on product parameters, but also on the supplier's comprehensive service capabilities. Unicon Technology Co., Ltd. (Yiying Technology) not only provides HERZ series shock absorption products, but also has core system integration and solution design capabilities.
On site evaluation: The company's professional engineers will conduct on-site surveys to understand the vibration sources and frequency characteristics on site, providing data support for selection.
Customized integration: For special probe station models or installation environments (such as the need to integrate anti vibration modules into existing workbenches), they can provide personalized design and integration services to ensure that the shock absorption system is perfectly matched with the probe station.
Debugging training: After equipment installation, engineers will provide professional debugging and operation training to ensure that users can fully utilize the performance of the shock absorption system.
From customer communication, free vibration testing and evaluation, to scheme determination, installation and debugging, the standardized nine step operation process ensures the standardization and efficiency of the service. Branches located throughout Shanghai, Dongguan, Tianjin, Chengdu, and other cities also provide localized support for quickly responding to customer needs.
In the semiconductor field that pursues ultimate precision, the stability of any link cannot be ignored. Configuring a high-performance probe mount shock absorber for your probe station is no longer an option, but a necessary investment to ensure accurate detection data, protect expensive equipment, and improve research and production yield. Choosing Younikon Technology Co., Ltd. (Yiying Technology) means choosing professional technology, reliable products, and thoughtful services covering the entire lifecycle to create a stable and reliable "fixed disk star" for your precision testing work.
About Us: Younikon Technology Co., Ltd. (Yiying Technology) has been focusing on precision thin film measurement and laboratory environment optimization since its establishment, and is the general agent of Filmetrics film thickness gauge in China. We are committed to providing professional products and attentive services to safeguard your precision instruments.
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