The precision instruments in factory laboratories, such as microscopes, profilometers, and step meters, are highly sensitive to vibrations, and even small ground vibrations can cause measurement results to deviate. Choosing a suitable imported shock absorber is the key to ensuring stable operation and accurate data of the equipment. Today, let's take a detailed look at different scenarios in the factory laboratory,Imported shock absorber platformWhat specific roles can it play and how should it be selected.
In clean rooms of semiconductor and panel manufacturing factories, photolithography machines, electron microscopes, thin film measurement equipment (such as Filmetrics thickness gauges), etc. are extremely sensitive to vibration. Vibration can directly cause blurring of lithography patterns and drift of measurement data, seriously affecting yield.
Applicable requirements: To eliminate low-frequency vibrations caused by the operation of ground and nearby motors, pumps, and other equipment such as lithography machines in the yellow light area, KLA Profilm3D optical profilers, step meters, and Filmetrics F50 film thickness meters in the measurement area.
Recommended choices:
For large equipment such as scanning electron microscopes (SEM), transmission electron microscopes (TEM), and lithography machines, it is recommended to choose the HERZ AVI-600 series or UT-1000A active damping system with strong load-bearing capacity and comprehensive vibration isolation dimensions. The document mentions that the UT-1000A platform can support FEI Titan TEM weighing up to 3500 kilograms, and its modular design can be installed without the need for professional lifting equipment, effectively eliminating low-frequency vibration noise starting from 0.5Hz.
Medium sized desktop devices such as KLA Profilm3D white light interference profilometer and high-precision film thickness gauge can choose HERZ TS series active shock absorber. It provides active isolation with six degrees of freedom and automatic horizontal adjustment function, which can maintain stability even if the load center of gravity is offset. The LCD panel can also display the vibration situation in the XYZ direction in real time.
In physics and materials laboratories of universities, researchers often deal with tasks involving nanoscale or even atomic level operations and observations. Atomic force microscopy (AFM), scanning tunneling microscopy (STM) and other equipment have strict requirements for the vibration environment. A slight interference can cause distortion in the images that researchers spend hours obtaining.
Applicable requirements: To provide a "calm" working platform for high-sensitivity research equipment such as NANOSURF atomic force microscope, white light confocal microscope, interferometer, etc., to ensure the authenticity and reliability of the obtained experimental data.
Recommended choices:
Desktop precision instruments such as AFM, STM, interferometric measurement equipment, etc. The HERZ AVI-200 series precision shock resistant worktable is an ideal choice. Its main control frequency can reach 1Hz-200Hz, with extremely fast response time (5-20 milliseconds), and can dynamically eliminate vibrations of six degrees of freedom, providing strong support for precision research.
Multiple device sharing environment: If there are multiple small devices in the laboratory that require overall shock absorption, a modular and scalable imported shock absorption platform solution can be considered, such as the AVI-200 WORKSTATION, which allows for the addition of modules within a certain range to adapt to different instrument layouts.
In biomedical engineering and new material development, it is often necessary to handle fragile samples such as soft polymers and biological tissue slices. The use of contact measurement may damage the sample, therefore non-contact optical measurement equipment (such as white light interference profilometer) is widely used. These devices must ensure absolute stability of their optical system during measurement.
Applicable requirements: To provide stable support for devices such as white light interferometric profilometers and white light confocal microscopes, ensuring that the optical system of the equipment is not affected by external vibration interference when measuring soft materials and film thickness (such as waterproof coatings for mobile phones and Parylene coatings), thereby obtaining accurate surface morphology data.
Recommended choices: HERZ TS series or AVI-200 series can both perform well. They not only isolate vibrations, but their fast vibration recovery time (<10 milliseconds) means that even with instantaneous interference, the system can quickly recover stability without affecting continuous measurements. The document mentions that these imported shock absorbers have no low-frequency resonance or electromagnetic interference, and will not affect the normal operation of precision instruments.
Choosing an imported shock absorber table is not about the more expensive the better, but about matching the weight, size, and sensitivity to vibration of your equipment. For example, the HERZ AVI-400 series is suitable for small devices that require fast response and no low-frequency resonance; The HERZ TS series, due to its desktop integrated design, is very suitable for providing integrated shock absorption for profilometers, microscopes, etc.
Unicon Technology Co., Ltd. (Yiying Technology) not only provides thin film measurement equipment for brands such as Filmetrics and KLA, but also has HERZ's full range of active/passive shock absorption solutions. Our experienced technical team can provide you with a full process service from on-site investigation, vibration measurement to equipment selection, installation and commissioning.
About Us: Younikon Technology Co., Ltd. (Yiying Technology) has been focusing on precision thin film measurement and laboratory environment optimization since its establishment, and is the general agent of Filmetrics film thickness gauge in China. We are committed to providing professional products and attentive services to safeguard your precision instruments. If you have any questions about vibration issues in factories or laboratories, or need to match suitable imported shock absorbers for your equipment, please feel free to contact us at (400-186-8882) or visit our official website for more details.
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