In cutting-edge fields such as semiconductor manufacturing, materials science, and nanotechnology, the measurement accuracy of high-precision detection equipment often reaches the nanometer or even sub nanometer level. However, small vibrations in the environment - whether from building equipment, personnel movement, or vehicle traffic - can become sources of interference for these 'precision eyes', leading to blurry images and inaccurate data. In order to ensure the stable performance of the equipment,Air floating damping tableThe active damping system has become an indispensable key supporting equipment in laboratories and production lines. This article will provide you with a detailed analysisAir floating damping tableThe core advantages of using in modern high-precision detection.
For devices such as scanning electron microscopes (SEM), atomic force microscopes (AFM), or white light interferometric profilometers, their working accuracy is usually at the nanometer level. According to the information provided by Unicon Technology Co., Ltd. (Yiying Technology), the vertical resolution of a KLA Profilm3D optical profiler can reach sub nanometer level (<1nm). When there is even a micrometer level amplitude on the ground, after being amplified by equipment, it may be reflected in the image as severe noise and deformation.
Traditional passive shock absorption methods (such as rubber pads and ordinary springs) have a certain effect on high-frequency vibrations, but when dealing with low-frequency vibrations in the range of 1Hz to 200Hz, the effect is often poor, and even low-frequency resonance may occur, which amplifies the interference. This is exactly the modern proactive approachAir floating damping tableThe value of HERZ AVI series lies in its ability to solve low-frequency vibration problems in a targeted manner, providing a truly stable measurement environment for equipment.
The low-frequency vibration that is difficult to eliminate in traditional passive systems is precisely the active typeAir floating damping tableThe main direction of attack. Taking the HERZ TS series active shock absorber as an example, its internal piezoelectric acceleration sensor will detect the pressure signal of external vibration in real time and convert it into an electrical signal to be sent to the piezoelectric transducer in the isolation module. Subsequently, the transducer will generate a pressure signal that is equal in magnitude and opposite in direction to the incoming pressure to 'counteract' the vibration.
This active isolation technology based on feedback loop can effectively eliminate vertical and two horizontal vibrations with amplitudes within 20 microns. According to product specifications, the HERZ TS series provides six degrees of freedom of active isolation in the range of 0.7Hz to 100Hz, effectively avoiding mechanical resonance, which is a performance that is difficult to achieve in any passive system.
Efficiency is crucial in high-throughput R&D or production environments. If the "response" of the shock absorption system is too slow, it will also affect the detection rhythm. high-qualityAir floating damping tableNot only is the vibration isolation effect good, but the response speed is also extremely fast.
For example, the vibration recovery time of the HERZ AVI-400 series active damping system is rapid, less than 10 milliseconds. This means that when the device is subjected to sudden impacts (such as opening or closing doors, or nearby equipment starting), the shock absorber can quickly stabilize again, and high-precision measurements can continue without a long wait. This fast response characteristic directly improves the efficiency of precision instruments and the repeatability of detection data.
Different precision instruments have varying volumes, weights, and working environments, and their requirements for shock absorption are also different. The solutions provided by Nikon cover a variety of application scenarios, reflectingAir floating damping tableGood applicability.
Desktop devicesFor profilometers and microscopes placed on ordinary experimental platforms, compact HERZ TS series or AVI-200 series active isolation systems are ideal choices. They are small in size and can be directly integrated into existing workbenches without taking up too much space.
Large scale instrumentsFor large equipment weighing several tons, such as transmission electron microscopy (TEM) or scanning electron microscopy (SEM), modular solutions are required. Taking the HERZ AVI-600 series or UT-1000A platform as an example, they adopt a modular design and increase the number of isolation modules, with a maximum load-bearing capacity of 9000 pounds. This design simplifies the installation process and even enables deployment without the need for specialized lifting equipment.
choiceAir floating damping tableIn fact, it is choosing a quantifiable stability. From the perspective of technical parameters, high-performance active damping systems can provide clear performance guarantees:
Isolation rangeActive isolation typically covers the critical range of 1Hz to 200Hz (such as AVI-600), while passive isolation is responsible for high frequencies above 200Hz.
system noiseExcellent systems can control their own noise at extremely low levels, such as AVI series below 50nG/√ Hz, ensuring that no new interference is introduced.
Vibration isolation efficiencyAt the critical 10Hz frequency point, the transmission rate can be as low as 0.017 (-35dB) or below, meaning that over 98% of vibrations have been effectively isolated.
These hard indicators ensure气浮减震台It can provide a stable working foundation for SEM, lithography equipment, and high-precision metrology equipment, helping users obtain more real and effective information from the instruments.
With the advancement of technology, the sensitivity of high-precision detection equipment continues to improve, and the requirements for laboratory environments are becoming increasingly stringent. Invest in a reliable performance system气浮减震台Not only does it protect expensive instrument assets, but it is also a key link in ensuring the accuracy of scientific research results and production efficiency. It actively eliminates invisible "invisible interference" to fully unleash the potential of precision instruments.
About UsSince its establishment, Younikon Technology Co., Ltd. (Yiying Technology) has been focusing on precision thin film measurement and laboratory environment optimization. It is the general agent of Filmetrics film thickness gauge in China. We are committed to providing professional products and attentive services to safeguard your precision instruments.
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