In cutting-edge research and production fields such as semiconductors, new materials, and biomedicine, every "shake" of precision measuring instruments may cause data deviations. Low-frequency vibrations in the environment are common interference sources that affect the measurement accuracy of equipment such as scanning electron microscopes, atomic force microscopes, and optical profilometers. How can these tiny vibrations be effectively isolated? The HERZ series active shock absorption system introduced by Uniicon Technology Co., LTD. (Yiying Technology) is now relying on its outstanding performancePerformance of the shock absorption tableIt has provided reliable solutions for numerous laboratories.
Unlike the traditional passive shock absorption platforms that rely on springs or air flotation for "buffering", the HERZ series active shock absorption systems adopt a more proactive strategy. The core principle is to use the piezoelectric acceleration sensor inside the controller to sense in real time the tiny vibrations from the ground or countertop. These sensors convert the vibration pressure signal into an electrical signal and transmit it to the piezoelectric transducer in the vibration isolation module. The transducer will instantly generate a pressure signal of the same magnitude but opposite direction as the incoming vibration, thereby "canceling out" the incoming vibration.
The advantage of this technology lies in its ability to effectively block low-frequency vibrations ranging from 1Hz to 200Hz, which are precisely the frequency bands that traditional passive systems find difficult to handle. Within the active vibration isolation range (1-200Hz), its transmission rate can drop below -35dB when it exceeds 10Hz, meaning that over 98% of the vibration is effectively isolated. When the frequency exceeds 200Hz, the system will switch to passive vibration isolation mode to achieve vibration suppression across the entire frequency band.
For different types of instruments in the laboratory, the HERZ series offers a wide range of choices to ensure that each device can achieve the appropriate shock absorption performance.
AVI-200 Series: Compact Active Vibration Isolation system
This product is suitable for integration into existing equipment that requires low-frequency vibration isolation function. Its response time is extremely fast, and adjustments can be completed within 5 to 20 milliseconds. For small and medium-sized precision instruments such as atomic force microscopes, interferometers, and profilometers, the AVI-200 series can provide six degrees of freedom of vibration isolation effect, and is easy to install without the need for complex auxiliary equipment such as air compressors.
AVI-400 Series: Modular active vibration isolation module
This product is specially designed for large-scale equipment and is presented in the form of modular units, which can be flexibly expanded according to the size and weight of the instrument. Its features include no low-frequency resonance, a rapid vibration recovery time (less than 10 milliseconds), and the adoption of low-power consumption technology. Even after long-term operation, it will not significantly heat up, thus avoiding the influence of heat sources on precise measurements. The static flexibility of each module in the vertical direction is approximately 1.75μm/N, and the system noise is lower than 50nG/√Hz, providing a stable working foundation for large-scale scanning electron microscopes and lithography equipment.
TS Series: Desktop Integrated Active shockproof table
The TS series is an ideal choice for desktop devices such as optical microscopes and step meters. It integrates an automatic level adjustment function. Even if the load center of gravity deviates from the center, it can automatically level it to ensure that the instrument remains in a stable level state at all times. Its LCD display panel can monitor the vibration conditions from the X, Y and Z directions in real time, allowing users to have a clear understanding of the performance of the shock absorption table at a glance.
AVI-600 and UT-1000A: Solutions for large and extra-large instruments
When confronted with transmission electron microscopes or ultra-high vacuum scanning probe microscopes weighing several tons, the AVI-600 series and the customized UT-1000A platform have demonstrated their load-bearing capacity. By increasing the number of vibration isolation modules, the system's load-bearing capacity can be expanded to a maximum of approximately 4,000 kilograms (9,000 pounds). The UT-1000A platform features an ultra-thin modular design, which simplifies the installation process. It can provide low-frequency vibration isolation starting from 0.5Hz for large electron microscopes without the need for dedicated lifting equipment, helping users obtain clearer and more stable results from high-magnification measurements.
The performance of a shock absorption table is ultimately evaluated based on specific data. The HERZ series of active shock absorption systems have solid performances in multiple key indicators:
Vibration isolation range: Active vibration isolation covers the key low-frequency area from 1Hz to 200Hz, while passive vibration isolation covers the frequency band above 200Hz, achieving full-frequency band protection.
Transmission rate: When the frequency exceeds 10Hz, the transmission rate is below -35dB, indicating that approximately 98.2% of vibration energy can be isolated.
Response time: A rapid response of 5 to 20 milliseconds enables the system to promptly deal with sudden vibration disturbances.
System noise: Background noise below 50nG/√Hz to ensure that it does not become a new source of interference.
Load-bearing capacity: From tens of kilograms for desktop devices to several tons for large equipment, there are corresponding modular solutions to support them.
Choosing a suitable shock absorption system is essentially investing in a stable measurement environment for expensive precision instruments. The HERZ series of shock absorption tables provided by Unicon Technology Co., LTD. (Yiying Technology) not only meet the diverse demands from R&D to production in terms of product performance, but also have a technical team with many years of industry experience behind them to provide support. From the initial communication of requirements, on-site investigation, to equipment installation and commissioning, operation training, as well as 7x24-hour rapid after-sales response, a service closed loop covering the entire life cycle of the equipment has been formed.
About Us: Since its establishment, Unicon Technology Co., LTD. (Yiying Technology) has been dedicated to the field of precision film measurement and laboratory environment optimization. It is the general agent of Filmetrics film thickness gauges in China. We are committed to safeguarding your precision instruments with professional products and considerate services.
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