In cutting-edge fields such as semiconductor manufacturing, nanotechnology research, and high-precision measurement and testing, small vibrations in the environment are often the "invisible killers" that affect equipment performance and data accuracy. When the scanning electron microscope, atomic force microscope, or lithography equipment that you have invested heavily in cannot perform as expected due to floor vibration, equipment resonance, or surrounding traffic interference, it is considered industrial gradeActive shock absorber platformthenBecoming a key defense line to ensure the stability of scientific research and production.
As a technology-based company specializing in precision measurement and laboratory environment optimization, Unicon Technology Co., Ltd. (Yiying Technology) has introduced advanced active vibration reduction technology into China through years of industry cultivation, providing reliable vibration isolation solutions for various precision instruments. This article will provide an in-depth analysis of the working principle, core advantages, and selection points of industrial grade active shock absorbers, to help you build a stable experimental and production environment.
For devices such as scanning electron microscopy (SEM), transmission electron microscopy (TEM), atomic force microscopy (AFM), and lithography machines, low-frequency vibrations in the environment are the main factors affecting imaging quality and measurement accuracy. These vibrations may originate from:
Building structure transmission: Low frequency vibrations generated by surrounding road vehicles, subway operation, elevator start stop, and indoor air conditioning and water pump equipment are transmitted to instruments through the building structure.
Equipment resonance: Internal moving parts of the instrument (such as sample stage movement or vacuum pump operation) may cause resonance at specific frequencies, interfering with measurement results.
Air disturbance and sound wave interference: Sound waves generated by air conditioning airflow, personnel movement, and even nearby audio equipment in the laboratory may be coupled as vibration noise.
When the amplitude of these vibrations reaches the nanometer or even sub nanometer level, it is enough to cause blurring of SEM images at high magnification, stripe noise in AFM scanning, or exceeding the lithography overlay accuracy. The HERZ series active shock absorber platform provided by Younikon Technology Co., Ltd. (Yiying Technology) is designed to solve such problems.
In isolation schemes, they are usually divided into two categories: passive isolation and active isolation. Understanding the difference between the two is the first step in choosing the right product.
Passive isolation system: relying on elastic components such as springs, rubber, and air springs, it has a good isolation effect on high-frequency vibrations (usually higher than the natural frequency of the system). Its structure is simple and does not require a power supply, but its isolation effect is limited in the low-frequency vibration range of 1-200Hz, and there is a problem of low-frequency resonance amplification, which cannot effectively handle the typical low-frequency interference transmitted by building structures.
Active damping platform: A feedback control system composed of piezoelectric sensors and actuators is used to detect vibration signals on the platform in real time, and generate reverse forces through the controller to actively counteract vibrations from the ground and the platform. This technology has a significant suppression effect on low-frequency vibrations in the 1-200Hz range and avoids low-frequency resonance amplification.
Taking the HERZ AVI-400 series active damping platform as an example, its system can actively isolate vibrations within the range of 1-200Hz, and passively isolate vibrations exceeding 200Hz. According to official technical specifications, at frequencies exceeding 10Hz, its vibration transmission rate can be lower than -35dB (i.e. vibration transmission rate less than 0.017), which means that the vast majority of disturbances in the environment are effectively blocked.
The key to achieving precise vibration suppression in industrial grade active shock absorbers lies in their internal core technology architecture. Taking the HERZ AVI series as an example, its system consists of a controller, piezoelectric sensors, piezoelectric actuators, and isolation modules.
The working principle can be summarized as follows:
Real time perception: The built-in piezoelectric acceleration sensor continuously monitors vibration signals from the ground and tabletop (including horizontal and vertical directions) with millisecond response speed.
Signal processing: The controller converts the vibration signal into an electrical signal and calculates the reverse force that needs to be compensated.
Active cancellation: The piezoelectric actuator generates a force equal in magnitude and opposite in direction to the input vibration based on control instructions, and completes dynamic cancellation within 5-20 milliseconds to keep the load platform stable.
This process covers six spatial degrees of freedom (including translation in the XYZ direction and rotation around three axes), achieving all-round vibration isolation. Compared to simple solutions that only provide vertical isolation, this six degree of freedom active isolation technology can more comprehensively ensure the stability of precision instruments under various complex disturbances.
According to the years of service experience of Younikon Technology Co., Ltd. (Yiying Technology), the following equipment is highly sensitive to vibration in installation environments, and its performance is significantly improved when paired with an active damping platform:
| Device Type | Typical Applications | Vibration sensitive points |
|---|---|---|
| electron microscope | SEM、TEM、FIB | During high magnification imaging, nanoscale vibrations can cause image blurring and reduced resolution. |
| atomic force microscope | AFM、SPM | During the probe scanning process, any sub nanometer level disturbance will introduce noise, affecting the morphology data. |
| Lithography and metrology equipment | Stepper lithography machine, high-precision profilometer | The precision and repeatability requirements for engraving are extremely high, and low-frequency vibration directly affects the process yield. |
| Interferometric measurement system | White light interferometer, laser interferometer | The measurement optical path is extremely sensitive to vibration, and active vibration isolation is a prerequisite for ensuring data reproducibility. |
For example, in the application of large equipment weighing 3500 kilograms such as FEI Titan TEM, the installation of four HERZ UT-1000A active damping table modules (customized integrated products of AVI series) effectively solves the low-frequency vibration noise problem that previously troubled users, enabling the equipment to obtain stable and clear images during high magnification scanning.
When selecting an active shock absorber platform, it is recommended to evaluate it comprehensively from the following dimensions:
Load capacity and size: Choose a single module or multi module combination solution based on the weight and bottom area of the instrument. The HERZ AVI series supports modular expansion, for example, the AVI-600 series can meet load requirements of up to 9000 pounds (approximately 4082 kilograms) by increasing the number of modules.
Isolation performance indicators: Focus on the active isolation frequency range (usually 1-200Hz) and transmission rate. In the parameter, 'exceeding 10Hz<'; -35dB "means that over 98% of the vibration energy in this frequency band is isolated.
System response speed: The response time of the active isolation system directly affects the suppression effect on sudden vibrations. The 5-20 millisecond response capability of the HERZ system is sufficient to handle transient disturbances in most environments.
Additional features: Some models are equipped with automatic level adjustment, system locking (for easy handling), LCD real-time display of vibration status, and other functions to enhance user convenience. The TS series desktop active shock absorber platform also has the ability to automatically level after the load center of gravity shifts.
For institutions that rely on high-precision instruments for research and production, environmental vibration control should not be considered an option, but a necessary condition to ensure equipment investment return. A reliable industrial grade active shock absorber platform that can isolate environmental interference from the source, ensuring that your SEM, AFM, or lithography machine always operates in a stable state and outputs real and reproducible data.
As a professional service provider in the field of precision measurement and laboratory environment optimization, Unicon Technology Co., Ltd. (Yiying Technology) not only provides core measurement equipment such as Filmetrics film thickness gauge and KLA profilometer, but also builds a one-stop capability for customers from "measurement" to "environmental protection" through HERZ's full range of active vibration reduction products. If you are facing the problem of precision instruments being affected by vibration, please visit the company's official website（https://www.unicorn-tech.com/）Or product page（https://www.unicorn-tech.com/product/list-165.html）Understand detailed plans and obtain professional technical support.
About Us: Younikon Technology Co., Ltd. (Yiying Technology) has been focusing on precision thin film measurement and laboratory environment optimization since its establishment, and is the general agent of Filmetrics film thickness gauge in China. We are committed to providing professional products and attentive services to safeguard your precision instruments.
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