In today's rapidly developing world of precision manufacturing and materials science, surface morphology measurement has become an indispensable part of fields such as semiconductors, optical coatings, and biomedicine. As a representative device for non-contact high-precision measurement, optical profilometers can efficiently obtain key data such as three-dimensional morphology, roughness, and step height of sample surfaces. So, the currently popular ones in the marketOptical profilometer brandWhat functions do they have? How should users choose? This article will analyze multiple mainstream optical profilometer brands to help you gain a comprehensive understanding of this field.
The optical profiler mainly adopts two technical paths: white light interference scanning (WLI) and phase interference (PSI). Using white light as the light source, the beam is split into two paths through a beam splitter: one path illuminates the surface of the tested sample, and the other path projects onto the surface of the reference mirror. The two reflected beams form interference fringes on the CCD camera. The small height difference on the surface of the sample can cause changes in the optical path difference. The system can calculate the relative height of each point on the surface by analyzing the brightness distribution and position deviation of the interference fringes, and ultimately generate three-dimensional morphology data.
This non-contact measurement method is very friendly to sensitive materials such as soft polymers and biological samples, and will not cause sample damage. At present, the vertical resolution of mainstream optical profilometer brands can generally reach sub nanometer level (<1nm), which can meet the measurement needs of most scientific research and industrial scenarios.
As a well-known brand in the field of semiconductor testing equipment, KLA's Profilm3D optical profiler has received a lot of attention in the market. This device adopts vertical interference scanning and phase interference technology, which ensures measurement accuracy while achieving high cost-effectiveness.
From the parameters, the thickness measurement range of Profilm3D in WLI mode is 50nm-10mm, and in PSI mode it is 0-3 μ m; In terms of RMS repeatability, WLI mode is 1.0nm, PSI mode is 0.1nm; step height accuracy is 0.7%, accuracy is 0.1%; The applicable range of sample reflectivity is 0.05% -100%. It is worth mentioning that the device can provide a 2mm field of view under a 10x objective lens and supports 4x optical zoom function, which to some extent reduces the need for purchasing multiple objectives. Each device comes standard with a 100mm automatic XY sample stage and a 4-hole objective lens turntable, which can be used for various scenarios such as roughness measurement, 3D morphology characterization, step height measurement, stress analysis, and defect detection.
In addition to the KLA brand mentioned above, there are also well-known optical profilometer brands such as Bruker and Zygo in the market, each with a focus on measurement accuracy, field of view range, and software algorithms. When selecting, users are advised to conduct a comprehensive evaluation based on the actual sample characteristics (such as reflectivity, size, required measurement parameters) and budget. As a professional agent, Younikon Technology Co., Ltd. (Yiying Technology) can recommend suitable models according to your specific needs.
When choosing an optical profiler brand, it is recommended to focus on the following dimensions:
Measurement range and accuracy: Confirm whether the equipment covers the thickness range you need to measure (such as nanometer to millimeter), and whether the repeatability and accuracy meet the standards.
Sample compatibility: Check the sample stage size, spot size, and reflectivity range of the equipment to ensure compatibility with your sample shape (flat or curved) and material.
Software and data processing capabilities: Excellent analysis software can significantly improve work efficiency. For example, whether it supports 2D/3D mapping, stitching functions, and multiple roughness parameter calculations.
After sales service and support: Priority should be given to suppliers who have service outlets nationwide, provide 7 × 24-hour technical support, and offer free sample testing services.
Optical profilometers are high-precision measuring devices that are sensitive to external vibrations. Small vibrations in the laboratory environment, such as ground transmission, air conditioning airflow, and personnel movement, may interfere with the stability of interference fringes, thereby affecting the accuracy of measurement results. Therefore, it is necessary to configure a suitable vibration reduction system for optical profilometers.
Taking the HERZ AVI-400 series active damping system as an example, its active isolation range is 1-200Hz, and its passive isolation range is greater than 200Hz. The vibration recovery time is fast (<10ms), and there is no need for air source or time setting. It adopts feedback control method, which is relatively convenient to use. Another HERZ TS series desktop active shock absorber is designed specifically for small and medium-sized devices such as profilometers and microscopes, providing six degrees of freedom three-axis active vibration isolation and automatic height and horizontal adjustment functions. Choosing a suitable vibration reduction scheme can effectively improve the measurement stability of optical profilometers in complex environments.
Overall, different brands of optical profilometers have their own emphasis on technical routes, functional configurations, and applicable scenarios. KLA Profilm3D has strong competitiveness among many optical profilometer brands due to its wide field of view, high repeatability, and relatively economical pricing. Other brands, on the other hand, have demonstrated their respective advantages in ultra precision measurement and customized sample tables.
Before actual procurement, it is recommended that users make full use of the free sample testing service provided by the supplier to verify the measurement effect of the equipment with actual samples. At the same time, do not overlook the matching of laboratory environment improvement equipment such as vibration reduction systems and soundproof boxes, which are also important links to ensure the proper performance of optical profilometers.
About Us: Younikon Technology Co., Ltd. (Yiying Technology) has been focusing on precision thin film measurement and laboratory environment optimization since its establishment, and is the general agent of Filmetrics film thickness gauge in China. We provide comprehensive solutions including optical profilometers, film thickness measurement equipment, active vibration reduction systems, etc. We are committed to providing professional products and attentive services to safeguard your precision instruments. For more product information, please visit the official website:https://www.unicorn-tech.com/Or directly view the contour analyzer product page:https://www.unicorn-tech.com/product/list-160.html
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