In cutting-edge fields such as semiconductor manufacturing, nanotechnology research, and high-precision measurement and testing, small vibrations in the environment are often the "invisible killers" that affect equipment performance and data accuracy. When the scanning electron microscope, atomic force microscope, or lithography equipment that you have invested heavily in cannot perform as expected due to floor vibration, equipment resonance, or surrounding traffic interference,Industrial grade active shock absorber platformIt has become a key defense line to ensure the stability of scientific research and production.
As a technology-based company focused on precision measurement and laboratory environment optimization,Younikon Technology Co., Ltd. (Yiying Technology)With years of deep industry cultivation, advanced active vibration reduction technology has been introduced into China, providing reliable vibration isolation solutions for various precision instruments. This article will provide an in-depth analysis of the working principle, core advantages, and selection points of industrial grade active shock absorbers, to help you build a stable experimental and production environment.
For devices such as scanning electron microscopy (SEM), transmission electron microscopy (TEM), atomic force microscopy (AFM), and lithography machines, low-frequency vibrations in the environment are the main factors affecting imaging quality and measurement accuracy. These vibrations may originate from:
Building structure transmissionLow frequency vibrations generated by surrounding road vehicles, subway operation, elevator start stop, and indoor air conditioning and water pump equipment are transmitted to instruments through the building structure.
Equipment self resonanceInternal moving parts of the instrument (such as sample stage movement and vacuum pump operation) may cause resonance at specific frequencies, interfering with measurement results.
Air disturbance and sound wave interferenceThe airflow of air conditioning in the laboratory, the movement of personnel, and even the sound waves generated by nearby audio equipment may all be coupled as vibration noise.
When the amplitude of these vibrations reaches the nanometer or even sub nanometer level, it is enough to cause blurring of SEM images at high magnification, stripe noise in AFM scanning, or exceeding the lithography overlay accuracy.Younikon Technology Co., Ltd. (Yiying Technology)The HERZ series providedActive shock absorber platformIt is designed to solve such problems.
In isolation schemes, they are usually divided into two categories: passive isolation and active isolation. Understanding the difference between the two is the first step in choosing the right product.
Passive isolation systemRelying on elastic components such as springs, rubber, and air springs, it has a good isolation effect on high-frequency vibrations (usually higher than the natural frequency of the system). Its structure is simple and does not require a power supply, butThe isolation effect is limited within the low-frequency vibration range of 1-200HzAnd there is a problem of low-frequency resonance amplification, which cannot effectively handle the typical low-frequency interference transmitted by building structures.
Active shock absorber platformA feedback control system composed of piezoelectric sensors and actuators is used to detect vibration signals on the platform in real time and generate reverse force through the controller,Proactively counteract vibrations from the ground and tabletopThis technology has a significant suppression effect on low-frequency vibrations in the 1-200Hz range and avoids low-frequency resonance amplification.
HERZ AVI-400 seriesActive shock absorber platformFor example, its system can actively isolate vibrations within the range of 1-200Hz, and passively isolate vibrations exceeding 200Hz. According to official technical specifications, at frequencies exceeding 10Hz, its vibration transmission rate can be lower than -35dB (i.e. vibration transmission rate less than 0.017), which means that the vast majority of disturbances in the environment are effectively blocked.
工业级Active shock absorber platformThe key to achieving precise vibration suppression lies in its internal core technology architecture. Taking the HERZ AVI series as an example, its system consists of a controller, piezoelectric sensors, piezoelectric actuators, and isolation modules.
working principleIt can be summarized as:
real-time perceptionThe built-in piezoelectric acceleration sensor continuously monitors vibration signals from the ground and tabletop (including horizontal and vertical directions) with millisecond response speed.
signal processingThe controller converts the vibration signal into an electrical signal and calculates the reverse force that needs to be compensated.
Proactively offsettingThe piezoelectric actuator generates a force equal in magnitude and opposite in direction to the input vibration based on control instructions, and completes dynamic cancellation within 5-20 milliseconds to maintain the stability of the load platform.
This process covers six spatial degrees of freedom (including translation in the XYZ direction and rotation around three axes), achieving all-round vibration isolation. Compared to a simple solution that only provides vertical isolation, thisSix degree of freedom active vibration isolationTechnology can more comprehensively ensure the stability of precision instruments under various complex disturbances.
according toYounikon Technology Co., Ltd. (Yiying Technology)Years of service experience, the following equipment is highly sensitive to vibration in installation environmentsActive shock absorber platformSignificant improvement in post performance:
| Device Type | Typical Applications | Vibration sensitive points |
|---|---|---|
| electron microscope | SEM、TEM、FIB | During high magnification imaging, nanoscale vibrations can cause image blurring and reduced resolution. |
| atomic force microscope | AFM、SPM | During the probe scanning process, any sub nanometer level disturbance will introduce noise, affecting the morphology data. |
| Lithography and metrology equipment | Stepper lithography machine, high-precision profilometer | The precision and repeatability requirements for engraving are extremely high, and low-frequency vibration directly affects the process yield. |
| Interferometric measurement system | White light interferometer, laser interferometer | The measurement optical path is extremely sensitive to vibration, and active vibration isolation is a prerequisite for ensuring data reproducibility. |
For example, in the application of large equipment weighing 3500 kilograms such as FEI Titan TEM, four HERZ UT-1000A are installedActive shock absorber platformThe module (customized integrated product of AVI series) effectively solves the low-frequency vibration noise problem that previously troubled users, enabling the device to obtain stable and clear images during high magnification scanning.
optional主动减震台It is recommended to conduct a comprehensive evaluation from the following dimensions:
Load capacity and sizeChoose a single module or multi module combination scheme based on the weight and bottom area of the instrument. The HERZ AVI series supports modular expansion, for example, the AVI-600 series can meet load requirements of up to 9000 pounds (approximately 4082 kilograms) by increasing the number of modules.
Vibration isolation performance indicatorsFocus on the active isolation frequency range (usually 1-200Hz) and transmission rate. In the parameter, 'exceeding 10Hz<'; -35dB "means that over 98% of the vibration energy in this frequency band is isolated.
System response speedThe response time of the active isolation system directly affects the suppression effect on sudden vibrations. The 5-20 millisecond response capability of the HERZ system is sufficient to handle transient disturbances in most environments.
Additional featuresSome models are equipped with automatic level adjustment, system locking (for easy handling), LCD real-time display of vibration status, and other functions to improve user convenience. Like TS series desktop models主动减震台It also has the ability to automatically level after the load center of gravity shifts.
For institutions that rely on high-precision instruments for research and production, environmental vibration control should not be considered an option, but a necessary condition to ensure equipment investment return. A set of reliable performanceIndustrial grade active shock absorber platformIt can isolate environmental interference from the root, allowing your SEM, AFM, or lithography machine to always work in a stable state and output real and reproducible data.
Younikon Technology Co., Ltd. (Yiying Technology)As a professional service provider in the field of precision measurement and laboratory environment optimization, we not only provide core measurement equipment such as Filmetrics film thickness gauge and KLA profilometer, but also build a one-stop capability for customers from "measurement" to "environmental protection" through HERZ's full range of active vibration reduction products. If you are facing the problem of precision instruments being affected by vibration, please visit the company's official website（https://www.unicorn-tech.com/）Or product page（https://www.unicorn-tech.com/product/list-165.html）Understand detailed plans and obtain professional technical support.
About Us:Since its establishment, Younikon Technology Co., Ltd. (Yiying Technology) has been focusing on precision thin film measurement and laboratory environment optimization. It is the general agent of Filmetrics film thickness gauge in China. We are committed to providing professional products and attentive services to safeguard your precision instruments.
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