In the precision manufacturing and semiconductor industries, film thickness gauges are the "golden eyes" that ensure product quality. Accurate thin film thickness data is crucial in chip manufacturing, optical coating, and new material research and development. However, facing numerous challenges in the marketManufacturer of film thickness measuring instrumentHow to choose a stable and reliable integrated testing equipment suitable for online production has become a focus of attention for many engineers.
This article provides a detailed analysis of the core points of the industrial online integrated thin film thickness detection equipment and introduces a mature solution from Younikon Technology Co., Ltd. (Yiying Technology).
Traditional film thickness measurement often requires sampling and offline testing, which is inefficient and unable to provide real-time feedback on production fluctuations. The industrial online integrated film thickness detection equipment can be directly integrated into the coating production line to achieve:
Real time monitoring: Measuring every second during the production process to detect thickness deviations in real-time.
Improve yield: Quickly feedback and adjust process parameters to reduce waste generation.
Non contact non-destructive: avoids damaging the surface of the product and is suitable for precision thin films.
Data traceability: Automatically record measurement data to provide a basis for process optimization.
For example, the Filmetrics F20 reflective film thickness gauge, represented by Nikon, can be measured in seconds by connecting to a computer via USB, making it flexible for online sampling or research and development scenarios. For fully automated production lines, the Filmetrics F60-t series provides industrial functions such as automatic groove detection and fully enclosed measurement platforms.
When choosing a manufacturer for film thickness measuring instruments, it is important to pay attention to the following parameters:
Measurement range and accuracy:
Covering thin films ranging from nanometers to millimeters. For example, the F20 series can measure 15nm-70 μ m (up to 450 μ m can be selected), with an accuracy of up to 0.02nm, meeting the needs from single-layer photoresist to thick film coatings.
For thicker film layers, the F50 series supports a maximum thickness measurement of 2mm, making it suitable for special industrial applications.
Material adaptability:
The equipment should be able to measure oxides, nitrides, photoresists, polymers, and even liquid thin films. Filmetrics film thickness gauge is based on the principle of light reflection interference and is suitable for smooth, semi transparent or low absorption coefficient thin films.
Online integration capability:
Does it support automated Mapping (thickness distribution map)? The F50 series is equipped with an automatic XY sample stage, which can measure about 2 points per second and generate 2D/3D distribution maps.
Does it support graphic recognition? The F54 series supports 4-12 inch wafer measurement with graphics, with a minimum spot size of 1 micron (F40 series), accurately locating small areas.
The industrial online integrated film thickness detection equipment has been widely used for:
Semiconductor manufacturing: measurement of silicon oxide, silicon nitride, and photoresist thickness.
Display technology: PI film and box thickness testing for OLED and LCD panels.
Consumer electronics: phone back shell hardening layer, waterproof coating, anodized film thickness.
New energy: solar cell thin films, lithium battery materials.
Biomedical: Drug coatings for cardiac stents, medical device coatings.
Unicon Technology Co., Ltd. (Yiying Technology) has provided relevant equipment and support to companies such as Samsung, Huawei, TSMC, and Changdian Technology, accumulating rich experience in online measurement.
Environmental vibration is a key interference source that affects data repeatability during high-precision film thickness measurement. Especially for ultra precision instruments such as near-field optical microscope shock absorbers, even small vibrations can lead to measurement deviations. Therefore, when deploying film thickness measurement systems (especially for models that are paired with microscopes such as the F54 series), it is crucial to have a professional shock-absorbing platform.
The near-field optical microscope shock absorber stage (such as the HERZ AVI series) can cancel out low-frequency vibrations from the ground and surrounding areas in real time at 1-200Hz through active piezoelectric sensing and feedback technology. For example, the HERZ AVI-400 series has the characteristics of short response time (<10ms), no need for gas source, and no electromagnetic interference. Placing the film thickness measuring instrument on the near-field optical microscope shock absorber stage can significantly improve testing stability, especially in semiconductor fab or multi device centralized laboratory environments. The near-field optical microscope shock absorber can also eliminate mechanical resonance, providing a quiet working platform for devices such as profilometers and AFM. Choosing an experienced supplier allows for integrated design of the near-field optical microscope shock absorber stage and measurement system.
In summary, although the near-field optical microscope shock absorber is not a device for directly measuring thickness, it is a "gatekeeper" that ensures the reliability of high-precision measurement results.
Choosing a reliable manufacturer of film thickness measuring instruments not only depends on equipment parameters, but also on their industry experience, service network, and solution capabilities. As the general agent of Filmetrics in China, Younikon Technology Co., Ltd. (Yiying Technology) provides a complete product line from single point film thickness gauges to online integrated film thickness detection equipment, accompanied by professional pre-sales testing and after-sales support.
About Us:
Since its establishment in 2012, Younikon Technology Co., Ltd. (Yiying Technology) has been focusing on precision thin film measurement and laboratory environment optimization. It is the general agent of Filmetrics film thickness gauge in China. We are committed to providing professional products and attentive services to safeguard your precision instruments. For more information, please visit our official website or contact us for free sample testing support.
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