Environmental vibration is a "hidden killer" that affects instrument performance in fields such as semiconductor manufacturing, nanomaterial characterization, and high-precision optical detection.Vibration reduction table applicationThrough active vibration isolation technology, it is possible to effectively eliminate low-frequency disturbances from the ground, air, and equipment itself, ensuring the authenticity and repeatability of measurement results. This article combines the practice of Younikon Technology in the field of precision measurement to analyze the core technical indicators and typical deployment schemes of active vibration isolation systems.
In laboratories or production lines, floor vibrations, air conditioning airflow, personnel movement, and even distant traffic can generate vibration noise of 0.5-200 Hz. For scanning probe microscopes (SPM), atomic force microscopes (AFM), white light interferometric profilometers, or scanning electron microscopes (SEM), such micrometer or even nanometer level displacements are sufficient to cause imaging blur, step height distortion, or film thickness measurement deviation. Traditional passive vibration reduction relies on rubber or air flotation, but it exhibits resonance amplification effect in the low-frequency range (<5 Hz) and has a long recovery time. The core value of the application of vibration reduction platform is to use active feedback control system to break through this bottleneck.
Transmission rate: When it exceeds 10 Hz and is below -35 dB, it means that the vibration attenuation is below 1.8% of the original amplitude.
Response time: 5-20 milliseconds, capable of handling sudden shocks or frequency disturbances with ease.
System noise: Below 50 nG/√ Hz, no additional micro vibrations will be introduced.
Static flexibility: about 1.75 μ m/N in the vertical direction and about 3.5 μ m/N in the horizontal direction, ensuring load-bearing rigidity.
Six degree of freedom vibration isolation: simultaneously suppressing disturbances in vertical, horizontal, and oblique directions.
Unlike air flotation stations that require compressed air, active systems have no low-frequency resonance or pressure requirements, are plug and play, and have extremely low power consumption (typical power consumption of AVI-200 is only 9W), making them suitable for long-term continuous operation.
光学轮廓仪与膜厚仪 如白光干涉仪或反射式膜厚测量系统，其垂直分辨率可达亚纳米级。将设备直接置于桌面一体型TS系列主动减振台上，可快速消除楼板振动，保证粗糙度和台阶高度重复性优于0.1 nm。
扫描电镜（SEM）与透射电镜（TEM） 高倍率成像时，10 nm以下的振动即会引起图像漂移。优尼康科技推荐的UT-1000A模块化主动减振系统，从0.5 Hz开始主动抑制振动，且采用超薄设计（模块厚度仅4.5英寸），无需拆卸电镜原有支撑脚即可安装。曾为一台重达3500公斤的FEI Titan TEM配置四个减振模块，安装后高倍扫描模式下的图像清晰度显著提升。
纳米压痕仪与探针台 力学测试中的载荷-位移曲线对垂直振动极为敏感。主动隔振可将系统噪声基底降低至50 nG/√Hz以下，确保硬度和杨氏模量数据的真实性。
When selecting, attention should be paid to the carrying capacity (AVI-200 single module supports about 250 kg, AVI-600 single module supports about 600 kg, can be expanded in parallel), workbench size (customizable), and whether automatic leveling function needs to be integrated.
As a company that has been deeply involved in the field of precision measurement for more than ten years, Unicon Technology not only provides high-end equipment such as Filmetrics film thickness gauges and KLA profilometers, but also has independent research and integration capabilities for active vibration reduction systems. Its core team has over 10 years of experience in thin film measurement and environmental optimization, and is able to design equipment and integrate systems according to customers' specific application needs. From early vibration testing and scheme design to installation, debugging, and 7 × 24-hour after-sales response, a complete service loop is formed. At present, the application of vibration reduction tables has been implemented in multiple semiconductor wafer fabs, advanced packaging laboratories, and university nano centers, providing stable support for key processes such as photolithography alignment, TSV measurement, and OLED film thickness monitoring.
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