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Can optical profilometer manufacturers measure step height and roughness?

2026-06-27 16:45:51 优尼康-MKT

In the fields of precision machining such as semiconductor manufacturing, new material research and development, and new displays, surface morphology and dimensional accuracy directly determine the final performance of products, and step height and surface roughness are core quality control indicators that run through the entire production process. Many companies ask a core question when purchasing testing equipment: Can optical profilometer manufacturers measure step height and roughness? The answer is yes, as a professional specializing in precision measurement for more than ten years, UniconContour meter manufacturerNot only can it accurately measure these two basic parameters, but it can also provide an integrated detection solution covering multi-dimensional surface characteristics, adapting to the refined quality control needs of different industrial scenarios.

1、 The core measurement capability of optical profilometer: step height and roughness

The optical profilometer is based on the principle of white light interference to achieve non-contact surface detection. By combining the two technical modes of vertical interference scanning (WLI) and phase interference (PSI), it can simultaneously achieve high-precision measurement of step height and surface roughness. The KLA Profilm3D optical profilometer, represented by Younikon, is suitable for detecting large-sized steps in WLI mode, with a measurement range covering 50nm-10mm and an RMS repeatability of 1.0nm. The PSI mode is optimized for ultra smooth surfaces, with a measurement range of 0-3 μ m and an RMS repeatability as low as 0.1nm. The step height accuracy can reach 0.7% and the precision is 0.1%. All detection data comply with the ISO25178 international standard.

In addition to core parameters, the KLA full range optical profilometer represented by Younikon can also synchronously obtain multidimensional information such as film thickness, external stress, and surface defects. It adopts non-contact measurement method, which will not cause damage to sensitive materials such as soft polymers and biological samples. It can adapt to various sample shapes such as flat and curved surfaces, meeting the detection needs of complex structures.

2、 The technical implementation path of professional contour instrument manufacturers

High quality contour instrument manufacturers do not simply sell equipment, but complete technology integration and customized solutions based on industry application needs. As the core distributor of KLA's full range of profilometers, Unicon's main product, the KLA Profilm3D optical profilometer, is equipped with a 10x objective lens to achieve a 2mm large field of view detection, coupled with a 4x optical zoom function. It can complete measurements with different accuracy requirements without frequent switching of objectives, effectively reducing procurement costs for enterprises. The equipment comes standard with a 100mm automatic XY sample stage, a 4-hole objective lens turntable, and a manual leveling device. It supports automated batch testing, and single point measurement can be completed within seconds. It can also achieve complete analysis of large-area surface morphology through software splicing function.

In response to the testing needs of large-sized samples such as 12 inch wafers in the semiconductor industry, Unicon, as a professional profilometer manufacturer, can expand the sample table size to 590mm × 550mm or more, support custom measurement point maps, generate 2D/3D thickness and morphology distribution maps, and help enterprises quickly locate process deviations.

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3、 Practical measurement application directions in industrial scenarios

The KLA full range of optical profilometers and probe based profilometers, represented by Younikon, cover the full range measurement requirements from nanometer to micrometer, and are mainly used for precision quality control and R&D verification in the following industrial scenarios:

Semiconductor manufacturing and packaging testing field

Wafer manufacturing process: measurement of step height of dielectric film, characterization of surface roughness of epitaxial layer, and surface flatness detection after chemical mechanical polishing (CMP)
Lithography process: measurement of photoresist pattern contour and line width, re inspection of mask template defects
Advanced packaging: wafer level packaging (WLP) bump height and coplanarity detection, TSV via depth and sidewall morphology analysis
Compound Semiconductor: Measurement of Surface Defects and Stress Distribution in Gallium Nitride/Silicon Carbide Epitaxial Layers

New Display and Optical Fields

Display panel: LCD cell gap uniformity detection, OLED pixel structure morphology characterization
Flexible Electronics: Analysis of Surface Cracks and Roughness Changes after Flexible Substrate Bending
AR/VR Optics: Surface Texture and Step Height Measurement of Diffraction Optical Waveguides, and Shape Detection of Micro Lens Arrays
Optical components: surface roughness of optical thin films, coating step height, and defect detection

In the field of new energy and energy storage

Solar cells: Measurement of surface morphology and roughness of perovskite/silicon-based cell thin films, detection of electrode grid line height and width
Lithium batteries: analysis of surface flatness of positive and negative electrode plates, detection of diaphragm thickness and surface defects, characterization of uniformity of current collector coating

Precision electronics and components field

Printed circuit board: PCB/FPC circuit copper thickness and step height measurement, solder pad surface roughness detection
Micro Electro Mechanical Systems (MEMS): Measurement of Three Dimensional Structural Morphology, Cantilever Beam Deflection, and Stress Distribution of MEMS Devices
Magnetic materials: Surface roughness and step height detection of magnetic heads, re inspection of surface defects on magnetic films

Medical and biomaterials field

Medical devices: measurement of surface roughness and coating step height of cardiac stents, characterization of surface morphology of implantable devices
Biomaterials: Surface structure analysis of tissue engineering scaffolds, uniformity and thickness testing of medical coatings

Research and university laboratory field

Materials Science: Research on Surface Morphology and Roughness of New Thin Film Materials, Characterization of Material Mechanical Properties (Stress/Strain)
Nanotechnology: Three dimensional morphology measurement of nanostructures and nanodevices, distribution and size analysis of nanoparticles

4、 Summary

In summary, as a professional profilometer manufacturer with strong technical strength, Unicon's full range of KLA optical profilometers and probe profilometers can accurately measure step height and surface roughness, and can provide customized detection solutions according to the special needs of different industries such as semiconductor, display, and medical. Relying on national branches such as Shanghai, Dongguan, Tianjin, and Chengdu, Younikon provides free sample testing, 24/7 online technical support, and localized installation and debugging services. This not only ensures the accuracy and stability of testing data, but also provides strong technical support for enterprise process optimization and product upgrading.

Tags: 轮廓仪厂家