Precision instruments such as electron microscopes, lithography machines, and nanoindentation instruments are extremely sensitive to sub nanometer vibrations. If the environmental vibration exceeds the tolerance threshold of the equipment, it will cause image blurring, measurement deviation, and even equipment damage. As a professionShock absorber manufacturerBased on more than ten years of experience in thin film measurement and vibration isolation, Unicon Technology provides a full range of products covering passive vibration isolation to active vibration isolation. This article helps you determine the required isolation level of the equipment based on real technical parameters.
Ordinary rubber or air isolation is passive, with weak isolation ability for low-frequency vibrations ranging from 1Hz to 200Hz, and there is a low-frequency resonance amplification effect. As a manufacturer of vibration reduction tables, Younikon mainly promotes active vibration isolation systems: real-time detection of input vibration through piezoelectric sensors, driving transducers to generate reverse force to counteract vibration, and internal feedback loops to suppress mechanical resonance. The active isolation range is 1Hz~200Hz, and if it is higher than 200Hz, it will be handled by the passive part. The active system does not require compressed air, with a response time of only 5-20 milliseconds and no low-frequency resonance.
For heavyweight instruments such as scanning electron microscopy (SEM), transmission electron microscopy (TEM), and lithography equipment, a single vibration reduction table manufacturer's solution is often difficult to support. Younikon offers the AVI-600 module (single module load-bearing capacity: vertical static flexibility of approximately 12 μ m/N), which can increase the total load-bearing capacity to 9000 pounds (approximately 4082 kilograms) by increasing the number of modules. If further simplification of installation is needed, the UT-1000A platform is designed specifically for electron microscopy integration - with an ultra-thin modular structure that allows for the placement of vibration isolation modules under the leveling feet of the electron microscope without the need for specialized lifting equipment. The active isolation starting frequency of this platform can be as low as 0.5Hz (with LFS system), and it has successfully supported a 3500 kg FEI Titan TEM.
If the environmental vibration mainly comes from low-frequency sources such as ground walking, air conditioning units, water pumps, etc. (1-50Hz), active vibration isolation must be selected. According to the measured data in the attachment, the AVI system of vibration reduction platform manufacturer Younikon has a vibration isolation efficiency of -35dB above 10Hz (i.e. vibration transmittance less than 0.017). For harsh environments with ultra-low frequencies (0.5~1Hz), the UT-1000A with LFS option can provide effective isolation. If the vibration is mainly above 50Hz (such as high-frequency noise in building structures), passive isolation or air isolation platforms can be prioritized.
Lightweight (<50kg) and only needs to eliminate desktop stepping vibration → TS series active table.
Medium sized equipment (50-300kg) with low-frequency interference from air conditioning and water pumps → AVI-200 or AVI-400 module.
Large scale electron microscope/lithography machine (>300kg) sensitive to 0.5Hz ultra-low frequency → UT-1000A customized integrated solution.
The equipment needs to be frequently moved or multiple devices need to share the isolation platform → AVI-600 modular array.
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