Optical film thickness measuring instrument is an indispensable core detection equipment in modern precision manufacturing and scientific research fields. Based on the principle of light interference, it can accurately measure key parameters such as thickness, refractive index, and reflectivity of various thin films in a non-contact manner. As the general agent of the global top reflective film thickness measurement brand in China, U-Nikon has been deeply involved in the field of precision thin film measurement for more than ten years, providing optical film thickness measurement solutions suitable for different scenarios for various industries. With the rapid development of industries such as semiconductors, display panels, and new energy, the precision requirements for thin film processes are constantly increasing,Optical film thickness measuring instrumentIts application range is also becoming increasingly wide, from nanoscale semiconductor photoresist to millimeter level optical coatings, its presence can be seen. Younikon will comprehensively analyze the specific applications of optical film thickness measuring instruments in various core fields, helping industry practitioners better understand their value and selection points. 1、 Semiconductor Manufacturing and Packaging Testing: The Core Application Fields
The semiconductor industry is the largest application market for optical film thickness measuring instruments, and every step from silicon wafer manufacturing to wafer level packaging cannot be separated from precise film thickness control. In semiconductor technology, even a deviation of only a few nanometers in film thickness can lead to a decrease in chip performance or even failure. Therefore, optical film thickness measuring instruments have become standard equipment in semiconductor production lines. The customers served by Younikon include industry leaders such as TSMC, Changdian Technology, and Sanan Optoelectronics. The optical film thickness measuring instruments provided by Younikon have passed strict verification through advanced processes.
In the silicon wafer manufacturing stage, optical film thickness measuring instruments are mainly used to detect the thickness and uniformity of dielectric thin films such as silicon oxide and silicon nitride. These dielectric films serve as insulation and passivation layers for chips, and their thickness directly affects the electrical performance of the chip. For example, uneven thickness of the silicon oxide layer can cause fluctuations in the threshold voltage of transistors, thereby affecting the yield of chips. The high-precision optical film thickness measuring instrument, represented by Younikon, can achieve precise detection of thickness changes at the 1nm level, ensuring process consistency of dielectric thin films.
In the photolithography process, an optical film thickness gauge is used to measure the thickness and uniformity of photoresist. Photoresist is a key material in semiconductor lithography process, and its thickness directly affects the resolution and pattern transfer accuracy of lithography. Modern advanced photolithography processes require the deviation of photoresist thickness to be controlled within ± 1%, which places extremely high demands on the accuracy of optical film thickness measuring instruments. At present, the optical film thickness measuring instrument mainly promoted by Nikon can achieve a measurement accuracy of 0.02nm, fully meeting the requirements of advanced photolithography processes.
In addition, optical film thickness gauges are widely used in wafer level packaging, microelectromechanical systems (MEMS), compound semiconductors, and other fields. For example, in wafer level packaging, it is used to measure the thickness of passivation layers and metal layers under bumps; In MEMS device manufacturing, it is used to measure the thickness of sacrificial layers and structural layers; In compound semiconductors, it is used to measure the thickness and uniformity of epitaxial layers.
2、 New Display and Optical Devices: Promoting the Upgrade of Display Technology
The new display industry is another important application area for optical film thickness measuring instruments. With the rapid development of display technologies such as OLED, flexible display, Micro LED, etc., the structure of display panels is becoming increasingly complex, involving more and more types of films, and the requirements for controlling film thickness are also increasing. Unicon provides a complete set of thin film measurement solutions for leading display companies such as BOE, helping to iteratively upgrade display technology.
In the manufacturing of OLED display panels, optical film thickness measuring instruments are mainly used to measure the thickness of organic thin films such as organic light-emitting layers, hole transport layers, and electron transport layers. The thickness of these organic thin films directly affects the luminous efficiency, color uniformity, and service life of OLED devices. Due to the sensitivity of organic materials to contact measurement, non-contact optical film thickness measuring instruments have become the best choice. The optical film thickness measuring instrument represented by Younikon supports the measurement of flat and curved samples, perfectly adapting to the detection needs of flexible OLED panels.
In the manufacturing of LCD display panels, optical film thickness gauges are used to measure the thickness of thin films such as ITO transparent conductive films, alignment films, and color filters. Especially ITO film, as the electrode layer of LCD panel, its thickness and uniformity directly affect the conductivity and transparency of the panel. In addition, the optical film thickness measuring instrument can also be used to measure the cell gap of LCD panels, which is one of the key parameters affecting the display effect of LCD panels.
In addition to display panels, optical film thickness measuring instruments are also widely used in the manufacturing of various optical devices, such as optical lenses, eyeglass lenses, filters, reflectors, etc. These optical devices typically require the deposition of multiple layers of optical thin films to achieve specific optical properties. The optical film thickness measuring instrument can accurately measure the thickness of each layer of thin film, ensuring that the performance of the optical device meets the design requirements.
3、 New Energy and Power Batteries: Supporting the Development of Green Energy
With the rapid development of the global new energy industry, the application of optical film thickness measuring instruments in the field of new energy is becoming increasingly widespread. In the manufacturing of solar cells and lithium-ion batteries, thin film technology is one of the core processes, and optical film thickness measuring instruments are key equipment to ensure the quality of thin film technology. Unicon provides professional thin film measurement equipment for leading new energy companies such as BYD, helping to promote the development of the green energy industry.
In solar cell manufacturing, optical film thickness measuring instruments are mainly used to measure the thickness of passivation layers, anti reflection films, electrode layers and other thin films on the surface of silicon wafers. For example, the thickness of the silicon nitride anti reflection film on the surface of crystalline silicon solar cells directly affects the light absorption efficiency of the cell. By precisely controlling the thickness of the anti reflection film, the photoelectric conversion efficiency of solar cells can be improved by 1-2 percentage points, which is of great significance for reducing the cost of solar power generation.
In the manufacturing of lithium-ion batteries, optical film thickness gauges are used to measure the coating thickness of positive and negative electrode materials, as well as the coating thickness of separators. The thickness and uniformity of these coatings directly affect the capacity, cycle life, and safety of the battery. For example, uneven thickness of positive and negative electrode coatings can lead to uneven current distribution during battery charging and discharging, resulting in local overheating and even causing battery fires and explosions. Therefore, using an optical film thickness measuring instrument for online detection of battery coatings is an important means to ensure the quality and safety of lithium batteries.
4、 How to choose a suitable optical film thickness measuring instrument
How to choose the equipment that suits your needs when facing numerous optical film thickness measuring instruments on the market? Firstly, it is necessary to select the appropriate model based on the characteristics of the measured object. For example, for single point rapid measurement, a portable optical film thickness gauge can be chosen, such as Nikon's Filmetrics F20, which uses USB to connect to a computer, can be installed in a few minutes, and measurement results can be obtained within seconds, making it very suitable for laboratory and small-scale production use.
For applications that require large-area uniformity testing, optical film thickness measuring instruments with automatic mapping function, such as the Filmetrics F50 from Nikon, can be selected. It can automatically perform multi-point measurements on the sample and generate 2D or 3D thickness distribution maps, visually displaying the thickness uniformity of the sample. The measurement speed of Filmetrics F50 is about 2 points per second, and it can measure samples with a maximum diameter of 450mm, fully meeting the large-area detection needs of industries such as semiconductors and display panels.
In addition, technical parameters such as measurement accuracy, measurement range, and spot size also need to be considered. Generally speaking, the semiconductor industry requires higher measurement accuracy, while the optical coating industry requires a wider measurement range. The size of the light spot determines whether the device can measure the thickness of thin films in small areas. For measuring micro devices such as MEMS devices and Micro LEDs, it is necessary to choose an optical film thickness measuring instrument with a smaller light spot. Younikon offers a full range of optical film thickness measuring instruments and provides free sample testing services to help customers verify the compatibility of their equipment and reduce procurement risks.
V. Conclusion
In summary, optical film thickness measuring instruments, as the core equipment in the field of precision thin film measurement, have been widely used in many fields such as semiconductors, display panels, new energy, medical devices, consumer electronics, and scientific research. With the continuous development of high-tech industries, the precision requirements for thin film processes will become increasingly high, and the importance of optical film thickness measuring instruments will also become increasingly prominent. As a precision thin film measurement expert, Younikon will continue to rely on its technological advantages and service network to provide better optical film thickness measurement solutions for various industries, and help promote the high-quality development of China's manufacturing industry.
