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Popular science popularization of knowledge related to step instruments
Unicon Micro-Class: What is a Step Gauge?
The step meter belongs to the contact-type surface topography measurement instrument, also known as the probe-type surface profilometer. The step meter features high measurement accuracy, large measurement range, stable and reliable measurement results, and good repeatability. It is widely used in various industries.
Measurement principle
When the stylus gently slides along the surface being measured, due to the presence of tiny peaks and valleys on the surface, the stylus not only slides but also moves up and down along the peaks and valleys. The movement of the stylus reflects the condition of the surface contour.
The performance of a step gauge depends on the following three aspects:
Test repeatability, test speed and ease of operation. These factors determine the quality of experimental data and the efficiency of experimental operations.
 
Here, taking a KLA step gauge provided by Unicon as an example, let's briefly introduce it.
Model: P-17
 
Supports step height measurement from a few nanometers to one millimeter, suitable for production and R&D environments.
P-17 is a KLA benchtop probe profilometer. This system supports 2D and 3D measurements of step height, roughness, warpage and stress, and its scanning can reach 200mm without image stitching.
This system integrates UltraLite sensors, constant force control and an ultra-flat scanning platform, and features outstanding stability. The program setup is simple and fast through functions such as click-based platform control, top-view and side-view optical systems, and resolution cameras with optical zoom.
The P-17 is equipped with various filters, leveling and analysis algorithms for quantifying surface topography, and can support 2D or 3D measurements. And fully automatic measurement is achieved through pattern recognition, sorting and feature detection.