Filmetrics F54 White Light Interference Film Thickness Measuring Instrument

The Filmetrics F54 white light interference film thickness measuring instrument can automatically move to the selected measurement point on an electric R-Theta platform to rapidly measure the film thickness at a speed of two points per second, with a sample diameter of up to 450 millimeters. You can choose from dozens of built-in concentric circle, rectangle, or linear pattern modes, or create your own measurement points without any quantity limit. With just basic computer skills, you can create your own recipe within minutes.

  • Name: 白光干涉膜厚测量仪
  • Brand : Filmetrics
  • Product model : F54
  • Place of Origin: 美国


Filmetrics F54 White Light Interference Film Thickness Measuring Instrument



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Product Introduction of Filmetrics F54 White Light Interference Film Thickness Measuring Instrument

Filmetrics F54 White light interference film thickness measuring instrumentIt can be powered by an electric deviceR-ThetaThe platform automatically moves to the selected measurement point and rapidly maps the film thickness at a speed of two points per second, SampleDiameter up to450millimeterDozens of built-in concentric circles can be selected,Rectangle,Or linear pattern mode,orEstablish measurement points without any quantity limit on your own.With just basic computer skills, you can create your own recipe within minutes.


Product features of Filmetrics F54 White Light Interference Film Thickness Measuring Instrument

  • The automated film thickness drawing system enables rapid positioning and real-time result acquisition.

  • Measurable sample film layer: Basically smooth. Non-metallic films can all be measured.

  • The surveying and mapping results are available2Dor3DPresentation, facilitating users to view from different perspectives;


Measurement principle of Filmetrics F54 white light interference film thickness Measuring instrument

When incident light passes through the interfaces of different substances, some of the light will be reflected. Due to the wave nature of light, the reflected light from multiple interfaces interferes with each other, causing the multi-wavelength spectrum of the reflected light to oscillate. From the oscillation frequency of the spectrum, the distance between different interfaces can be determined, and thus the thickness of the material can be obtained (the more oscillations, the greater the thickness). At the same time, other material properties such as refractive index and roughness can also be obtained.

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Product application of Filmetrics F54 White Light Interference Film Thickness Measuring Instrument

Semiconductor film layer

Display technology

Consumer electronics

Parrylin

Photoresist

OLED

Waterproof coating

Electronic products/Circuit board

Dielectric layer

ITOandTCOs

Radio Frequency Identification

Magnetic material

Gallium arsenide

Thick air box

Solar cell

Medical devices

Micro-electromechanical system

PVDandCVD

Aluminum shell anode film

Silicone rubber



Product parameters of Filmetrics F54 White Light Interference Film Thickness Measuring Instrument

Wavelength range

190nm-1700nm

Light source

Tungsten halogen lamps, deuterium lamps

Spot size

Standard1.5millimeter

Measurement accuracy2:

0.02 nm

Accuracy*Take the larger one

1nmor0.2%

Stability3:

0.05 nm

5XObjective lens thickness range

20nm-120mum

For more parameters, please contact us



Measurement diagram of Filmetrics F54 white light interference film thickness Measuring instrument

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label: KLA Filmetrics

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