HORIBA UVISEL Plus Ellipsometric Spectrometer
Product Introduction of HORIBA UVISEL Plus Ellipsometric Polarization Spectrometer
HORIBA UVISEL Plus Phase-modulated ellipsometric spectroscopyThe instrument is based on the new version of electronic equipment, data processing and high-speed monochromatorFastacqTechnology can provide users with high-resolution and rapid data collection.FastAcqSpecially designed for thin film characterizationDual modulation technologyThis enables you to obtain complete test results.Phase modulation and achromatic optical designThe combination provides a particularly good film thickness testing effect. The special design equipped with a dual monochromator system meets users' expectations. Through modular design and more accessory options, the use of the instrument becomes flexible. It can characterize various thin film materials,Including dielectric films, semiconductors, organic substances, metals, metamaterials and nanomaterials, etc.
Product advantages of HORIBA UVISEL Plus Ellipsometric Polarization Spectrometer
Sensitivity: The measurement speed has been significantly improved
UVISEL PlusThe phase modulation ellipsometer offers simple and rapid polarization modulation and can be used for the measurement of various samplesFastAcqThe rapid acquisition technology has enhanced the test sensitivity, thereby enabling the acquisition of more information about interfacial thin films and nanoscale low-contrast substrate samples.
Flexible
UVISEL PlusThe phase modulation ellipsometer features a modular design that can be flexibly expanded to meet your application and budget requirements. Compared with other suppliers,UVISEL PlusThe upgradable performance of the phase-modulated ellipsometer system will better meet your future application requirements(190-2100nm)Calibration only takes a few minutes.
Simple
AutoSoftThe software interface is characterized by an intuitive workflow, making data collection and analysis more convenient and easier for non-professionals to operate.
Fast
UVISEL PlusThe phase modulation ellipsometer is integratedFastAcqRapid collection technology is available at3High-resolution samples can be achieved within minutes(190-2100nm)Calibration only takes a few minutes.
Measurement principle of HORIBA UVISEL Plus Ellipsometric Polarization Spectrometer product
HORIBA UVISEL Plus Ellipsometer is a non-contact measurement method that measures film thickness by utilizing the optical properties of thin films. The thickness and refractive index of the film are measured based on the state changes of polarized light during reflection or transmission. When polarized light shines on the surface of a film, the polarization state of the reflected or transmitted light will change. This change depends on the thickness of the film, its refractive index, as well as the polarization state and Angle of the incident light. By analyzing these changes, the thickness of the film can be accurately deduced.
HORIBA UVISEL Plus Ellipsometric Spectrometer Software:
AutoSoftThe software offers one-click testing and analysis. It comes with a ready-to-use menu library to help you take control of all ellipsometry analysis.
Customized menu
Create your own menu and collect data automaticallymappingThe analysis of thin film structures can be achieved with just one click. A complete database of materials and models
AutoSoftThe software provides a large number of material models to facilitate your description and setup of materials and membrane systems.
Multi-valued computation
Multi-valued computation isHORIBAThe algorithm can quickly and accurately find the matching results. Multi-value calculation can be applied to the calculation of film thickness and other dispersion parameters, which can reduce the cumbersome fitting steps.
DeltaPsi2 serves all the functions of ellipsometry
DeltaPsi2The software offers full functional control from testing to modeling analysis, output reports, and automatic operation, eliminating the need to switch between multiple software programs and making daily testing more convenient.
Technical features of HORIBA UVISEL Plus Phase Modulation Ellipsometer:
The signal acquisition process has no moving parts
There are no additional components in the optical path
High-frequency modulation50kHz
Test the full range of ellipsometric angles, Ψ(0-90,∆ (0-360)
Common applications of HORIBA UVISEL Plus Ellipsometry spectrometer
Reflection and transmission ellipsometry tests | Roughness | Interface | Gradient layer |
Periodic structure | Anisotropy | Alloy | Nanoparticles |
Bandgap calculation | n,kMulti-valued computation | Scattering test | Multiple incident angles are ellipsoidal |
Industry applications of HORIBA UVISEL Plus Ellipsometry Spectrometer
Dielectric film | Semiconductor | Organic matter |
Metamaterial | Nanomaterials | AndMore... |
Product parameters of HORIBA UVISEL Plus Ellipsometric Polarization Spectrometer
| UVISELPlus | UVISELPlusNIR |
Spectral range | 190-885nm | 190–2100nm |
Light source | 75WXenon lamp |
Contact us for more parameters… |
