KLA iMicro Nanoindentation instrument
Product Introduction of KLA iMicro NanoIndentation Instrument:
KLA iMicro Nanoindentation instrumentIt can easily measure hard coatings, films and small amounts of materials. This instrument is accurate, flexible and user-friendly, and can be providedIndentation, hardness, scratch and general nanoscale testingAnd a variety of nanoscale mechanical tests.Interchangeable drivesIt can provide a large dynamic range of force loads and displacements, enabling researchers to conduct detailed and repeatable tests on materials ranging from soft polymers to hard metals and ceramics. Modular options are suitable for various applications:Material property distribution, specific frequency testing, scratch and wear testing, as well as high-temperature testing.KLA iMicro Nanoindentation instrumentIt features a complete set of test expansion options, including sample heating, continuous stiffness measurement,NanoBlitz3D/4DProperty distribution, andGemini2DThe force load sensor can provide friction and other dual-axis measurements.
Advantages of KLA iMicro Nanoindentation instrument:
Modular design,It not only has a wide range of testing functions, but also can provide high-throughput automated testing functions, and is equipped with a statistical data analysis package. It is suitable for nanomechanical property measurement, scanning probe microscopy imaging, high-temperature measurement andIVReal-time and experimental control of voltage and current characteristic testing, simple and easy-to-use test process development and test parameter setting.
StandardInForce1000The electromagnetic driver provides up to1NThe driving force.
The integrated high-speed controller electronic equipment accomplishes high-speed data acquisition100kHzCapture the instantaneous responses of materials, such as sawtooth rheology and fracture phenomena. The instrument uses a shorter time constant20musCapture the true response of the material at the moment.
The high-stiffness frame integrated with noise isolation function ensures accurate measurement of various materials.
A high-resolution optical microscope with digital zoom accurately locates samples.
Nanoindentation experts offer professional nanoindentation courses online, and the mobile application can provide real-time updates on testing methods.
Measurement principle of KLA iMicro Nanoindentation instrument:
KLA iMicro Nanoindentation instrumentA diamond indenter of a specific geometric shape is pressed into the material surface with a quasi-static load, and the loading is recorded in real time-The changes in load and indentation depth during the unloading process generateLoad-Displacement curveThrough curve analysis combined with mechanical models, parameters such as the nano-hardness and elastic modulus of the material are calculated.
The main applications of KLA iMicro nanoindentation instrument:
Hardness and modulus measurement (OliverPharr)
Mechanical characterization is of vital importance in the processing and manufacturing of thin films, including coating quality in the automotive industry and process control in both the front and back ends of semiconductor manufacturing.KLA iMicro The nanoindentation instrument can measure the hardness and modulus of various materials ranging from ultra-soft gels to hard coatings. The high-speed assessment of these characteristics ensures quality control on the production line.
Property distribution of high-speed materials
For many materials, including composite materials, their mechanical properties may vary by location.KLA iMicro Nanoindentation instrumentThe sample platform can be found atX"Axis andYMovement on the shaft100mmAnd inZAxial movement25mmThis makes the system suitable for different sample heights and enables measurements over a large sample area. OptionalNanoBlitzTopography and tomography software can quickly draw color distribution maps of any measured mechanical properties.
ISO14577 hardness test
KLA iMicro Nanoindentation instrumentIncluding pre-written onesISO14577The test method can measure complianceISO14577Standard material hardness. This testing method automatically measures and reports Young's modulus, instrument hardness, Vickers hardness and standardized indentation.
Polymer TanDelta, storage and loss modulus
KLA iMicro Nanoindentation instrumentIt can measure ultra-soft materials including viscoelastic polymerstandeltaAnd storage and loss modulus. Storage and loss modulus as well astandeltaIt is an important property of viscoelastic polymers, where energy is stored as elastic energy and consumed as heat. Both of these indicators are used to measure the energy consumption of a given material.
Quantitative scratch and wear tests
KLA iMicro The nanoindentation instrument can conduct scratch and wear tests on various materials. The coating and film will undergo chemical mechanical polishing.CMPIt undergoes multiple processes such as wire bonding to test the strength of the film and its adhesion to the substrate. The important thing is that these materials resist plastic deformation in these processes and remain as they are without substrate bubbling. Ideally, dielectric materials should have high hardness and elastic modulus, as these parameters help determine how the material will react under the manufacturing process.
High-temperature nanoindentation test
Nanoindentation at high temperatures is quite important for characterizing the material properties under thermal stress, especially for quantifying the failure mechanisms in thermomechanical processes. Changing the sample temperature during mechanical testing not only enables the measurement of behavioral changes caused by heat but also quantifies the transition plasticity of materials that are difficult to test at the nanoscale.
Industry applications of KLA iMicro Nanoindentation instrument:
Hard coating | Medical devices | Ceramics and glass |
Metals and alloys | Batteries and energy storage materials | Conforming materials |
Semiconductor | Automobiles and aerospace | Paints and coatings |
Technical advantages of KLA iMicro Nanoindentation instrument:
Continuous stiffness measurementCSM)
NanoBlitz3DRapid mechanical property distribution
NanoBlitz4DMechanical property tomography
ProbeDMPolymer testing
AccuFilThin-film method
300°CSample heating
International standardized nanoindentation testing
Upgrade options for KLA iMicro Nanoindentation instrument:
Scratch and wear test options
Scratch and wear tests apply constant or gradually increasing longitudinal loads to the probe as it passes over the sample surface, and can be used to characterize a variety of materials such as films, brittle ceramics and polymers.
Testing options for biological soft materials
The testing method for biomaterials utilizes continuous stiffness testingCSMThe characteristic modulus is1kPaThe biological soft materials on the left and right contain a flat-bottomed indenter and a test method for measuring the storage loss modulus of the soft materials.
DataBurst test options
DataBurstThe model is in Da100kHzTrigger data acquisition at a certain speed to capture the instantaneous response of the material, such as sawtooth rheology and fracture phenomena; Allow the measurement of mechanical properties of high strain rate materials under step loading; The instrument uses a shorter time constant to help customers capture the true response of materials at an instant.
InView Open software Development platform
InViewAn open software writing platform is adopted to help customers achieve full control over loading, measurement and calculation during the testing process. Used for designing novel or complex experiments. The open software writing platform offers customers greater flexibility: it helps them easily collect raw test data and fully utilize the final analysis results. Customers can fully browse, edit calculation formulas, customize parameters and achieve personalized experimental design. Users can freely design and modify the test parameters and process, providing the possibility for exploring new test methods.
Truetest I-V electrical test
TrueTestI-VThe option enables users to apply a specific voltage to the sample and measure the current of the indenter to characterize the local changes in electrical properties during nanomechanical measurements.
Active vibration isolation with modular racks
inKLA iMicro On the basis of the built-in passive vibration isolation of the nanoindentation instrument, active vibration isolation is added, providing good stability and accuracy for achieving high-difficulty nanomechanical measurements such as ultra-thin films. The active vibration isolation system reduces vibration in all six degrees of freedom without the need for adjustment.
High-precision linear optical encoder platform
Linear optical encoder(LOE)The option enhances the positioning accuracy of the testing process and is used for the positioning of micro-structures.
Indenter probe and calibration sample
InForce50,InForce1000andGeminiThe interchangeable indenter of the driver includesBerkovichSolid Angle, Vickers, as well as flat bottom and spherical indenter.
KLA iMicro Measurement diagram of the nanoindentation instrument
