KLA Zeta-20 white light confocal microscope

The KLA Zeta-20 desktop optical profilometer provided by Unicon Technology is a non-contact 3D surface topography measurement system. By using ZDot technology and multi-mode optical components, high-resolution 3D morphology information and true color images of sample surfaces can be collected simultaneously. The system integrates six different optical measurement techniques to measure various samples: transparent and opaque, low reflectivity and high reflectivity, smooth surfaces and rough textures, with step height measurement ranging from nanometer to millimeter. It can provide multiple parameter measurements such as step height, surface roughness (smooth surface sub nanometer roughness to rough surface roughness of hundreds of micrometers), film stress, sample warpage, transparent film thickness (30nm to 100 μ m), and has automatic defect detection function (can capture defects larger than 1 μ m), supporting multi-point measurement and fully automatic measurement of graphic recognition. Suitable for industries such as semiconductors and compound semiconductors, solar photovoltaic cells, MEMS microelectromechanical systems, wafer level packaging (WLCSP/FOWLP), PCBs and flexible circuit boards, medical devices and microfluidic devices, data storage, universities and research laboratories. Younikon Technology provides professional technical support.

Name：白光共聚焦显微镜

Brand： KLA

Model： Zeta-20

Origin：美国

KLA Zeta-20 white light confocal microscope

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KLA Zeta-20 White Confocal Microscope Product Introduction:

KLA Zeta-20white light confocal Microscope based onZDotComing from technology.Zeta-20 white light confocal Microscope It can perform imaging analysis on most materials and structures, ranging from smooth to high roughness, low reflectivity to high reflectivity surfaces, and transparent to opaque media.KLA Zeta-20white light confocal Microscope Using the modular design concept, we provide users with a range of hardware and software options to meet various measurement needs, and all hardware installation and operation are simple and easy to use.

KLA Zeta-20 White Confocal Microscope Product Features:

Zeta-20 White light confocal microscopy provides various optical testing techniques to meet the testing needs of users in different fields.
ZDotZLattice 3D imaging technology isZetaThe standard technology for all series of products,ZThe unique bright and dark field illumination scheme of the dot matrix, combined with different objective lenses, helps customers measure "difficult" surfaces.
ZI CInterference contrast imaging technology enables imaging and analysis of surfaces with nanoscale roughness.
ZSIWhite light differential interferometry technology has a vertical resolution of up to angstroms.
ZI White light interferometry technology is an ideal measurement technique for nanoscale height in a large field of view.
ZFTReflective spectral film thickness analysis technology, integrated broadband reflective spectral analyzer, capable of measuringULA+ 2et-20The thickness, refractive index, and reflectivity of thin film materials.

KLA Zeta-20 Advantages of white light confocal microscope products:

Repeatability and reproducibility
Contact measurement, suitable for various materials
Micro force control for measuring soft materials
Trapezoidal distortion correction can significantly reduce distortion caused by side views
Arc motion of arc correction compensation probe

Measurement principle of KLA Zeta-20 white confocal microscope product:

KLA Zeta-20 white light confocal Microscope The principle is to achieve high-resolution and high contrast optical slicing capability of the sample through confocal principle. It combines the characteristics of traditional optical microscopes and laser confocal microscopes, using broad-spectrum white light as the light source and eliminating defocused light interference through spatial filtering mechanism, thereby obtaining high-precision3D image.

The main applications of KLA Zeta-20 white light confocal microscope are:

step height	texture
appearance	stress
film thickness	defect detection

KLA Zeta-20 White Confocal Microscope Product Parameters:

	ZDOT	ZI	ZIC	ZSI	ZFT
Roughness:> 40nm	●
Roughness:<40nm			●
Large field of viewZHigh resolution direction		●
15nm-25mmstep height	●
5nm-100µmstep height		●
<10nm step height				●
Defect: Size <1µm, height <75nm			●	●	●
Defect: Size >1µm, height >75nm				●
30nm<Thin film and thickness <15µm
film thickness >15µm	●