KLA D500 probe based surface profilometer
The KLA D500 probe based surface profilometer (stage meter) provided by Unicon Technology adopts optical lever sensor technology, with a step height measurement range of nanometer to 1200 μ m, a vertical resolution of 0.38 Å, a step height repeatability of 5 Å or 0.1%, and a probe force adjustable from 0.03-15mg micro force. Equipped with a 140mm manual stage and a 5-megapixel high-resolution color camera, it supports trapezoidal distortion correction and arc correction functions. 2D measurements of step height, roughness, curvature, and stress can be performed to quantify the thickness of materials deposited or removed in processes such as etching, sputtering, deposition, spin coating, CMP, etc. Suitable for semiconductors and compound semiconductors LED、 Solar energy MEMS、 The research and production processes in industries such as automobiles, medical equipment, and university laboratories. Younikon Technology provides professional technical support.
KLA D500 Probe Surface Proformer Product Introduction:
KLA D500 probe based surface profilometerThe optical lever sensor technology provides high resolution, large height measurement range, and accurate micro force control. The advantage of contact measurement technology with probes is direct measurement, independent of material properties. Multiple force adjustments and probe size choices allow the machine to accurately measure various structures and materials. These functions can characterize the morphological changes caused by the addition or removal of materials, as well as measure the roughness and stress changes caused by changes in material structure.
KLA D500 probe based surface profilometerIncludes a 140mm manual stage and optical components with enhanced image control. Compact in size, designed specifically for universities, laboratories, and research institutes, suitable for semiconductor and compound semiconductor devices LED、 Solar energy MEMS、 The automotive and medical industries provide measurements of step height, roughness, and stress.
Product features of KLA D500 probe based surface profilometer:
5-megapixel high-resolution color camera
Flat scanning platform
Side view for measuring visualization
Control range of force from 0.03 to 15 milligrams
Z-direction scanning range can reach 1.2mm
140mm manual XY sample stage, equipped with Z-direction motor
Compliant with CE standards
Advantages of KLA D500 Probe Surface Profilometer:
Excellent repeatability and reproducibility performance
Contact measurement, suitable for various materials
Micro force control for measuring soft materials
Trapezoidal distortion correction can eliminate distortion caused by side views
Arc motion of arc correction compensation probe
Measurement principle of KLA D500 probe surface profilometer product:
KLA D500 probe based surface profilometer stepThe instrument adopts optical lever sensor technology. The optical lever sensor uses the laser beam reflected from the surface of the rotating shaft component to track the surface morphology. The reflected light beam is then projected onto the photodetector. For Alpha Step, the beam is divided into two parts: one side is projected onto the dual cell photodetector, and the other side is projected onto the single cell photodetector. This design allows for high-resolution measurements of smaller step sizes on the first detector and larger step sizes on the second detector. The deflection of the laser beam changes when the probe tracks the surface, and is sensed by the photodetector, which then converts this deflection into a morphology signal. The advantage of optical levers lies in the small mass of the entire component, allowing for low force measurements. In addition, the sensor has a fast response speed and can track changes in surface morphology.
The main applications of the KLA D500 probe based surface profilometer are:
2D surface morphology scanning | Ripple measurement |
Roughness measurement | Measurement of sample warpage and curvature radius |
Thin film stress measurement (Stoney equation) | Measurement of step height from nanoscale to 1.2mm |
The KLA D500 probe based surface profilometer has a wide range of industry applications:
Universities and laboratories
The KLA D500 probe based surface profilometer is an important research tool for any university, research institution, or laboratory. The system is capable of direct contact measurement, and the results are independent of material properties. Researchers can measure the deposition thickness of any transparent or opaque material. The Alpha Step profilometer is easy to operate and can be quickly mastered and used by users through simple training.
Depression generated by secondary ion mass spectrometry (SIMS)
Accurately measure the depth of the depression generated by secondary ion mass spectrometry (SIMS) to determine the relationship between ion concentration and depression depth. Measure the roughness of the concave bottom surface to characterize the uniformity of ion beam energy.
Experimental production
The Alpha Step probe profilometer is an ideal choice for small-scale experimental production. Operators can quickly focus and measure at multiple locations on the sample to reflect process changes on the surface of the sample. The software of Alpha Step profilometer also supports tracking of operator, system, and batch information to facilitate statistical process control in production.
Conventional applications
Alpha Step probe profilometer is widely used in production or research and development. For example, measuring the safety characteristics of textiles and roughness related to their absorbance, as well as applications in consumer electronics, including measuring the morphology of touch screens and the height of thin film steps on glass screens.
Semiconductors and compound semiconductors
Measure the surface morphology in the semiconductor front-end, back-end, and packaging processes, including measuring photoresist thickness, etching depth, sputtering height, morphology before and after CMP, roughness, sample warpage, and stress, to improve production process control.
KLA D500 Probe Surface Proformer Product Parameters:
Repeatability: | 5Å(0.10%) | Vertical resolution: | 0.38A | Vertical range: | 1200µm |
Needle pressure range: | 0.03~15mg | Horizontal resolution: | 0.1µm | Maximum scanning length: | 30mm |
Theta Stage (Manual): | 360° | Scanning speed: | 10~400µm/s | Sample thickness: | 20mm |
Sampling rate: | 60~2000Hz | Sample table diameter: | 80mm and 20mm | XY motion range (manual): | 140mm |
Measurement diagram of KLA D500 probe surface profilometer:
