Nanosurf AFSEM Atomic Force Microscope for Vacuum Environment

The Nanosurf AFSEM vacuum environment atomic force microscope provided by Unicon Technology, jointly developed by GETec and Nanosurf, can be directly integrated into the scanning electron microscope (SEM) cavity to achieve joint analysis of AFM and SEM. XY scanning range 90μ m× 90 μ m, Z-direction scanning range of 10 μ m, vertical direction noise base<30pm RMS, can construct real three-dimensional surface morphology and accurately measure height information, distance information, and material properties. The system adopts self sensing probe technology, requiring only 4.5mm space between the electron column and the sample, compatible with most SEM or dual beam systems (SEM/FIB), and does not affect the normal operation of SEM. Can be used in conjunction with FIB, EDX, nanoindentation stage, etc. Suitable for fields such as semiconductor packaging, integrated circuit failure analysis, characterization of lithium battery electrode materials, biomedicine, automotive components, materials science, and university research. Younikon Technology provides professional technical support.

  • Name Nanosurf AFSEM 真空环境用原子力显微镜
  • Brand Nanosurf
  • Model AFSEM
  • Origin 瑞士


Nanosurf AFSEM Atomic Force Microscope for Vacuum Environment



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The Nanosurf AFSEM vacuum environment atomic force microscope provided by Unicon Technology, jointly developed by GETec and Nanosurf, can be directly integrated into the scanning electron microscope (SEM) cavity to achieve joint analysis of AFM and SEM. The XY scanning range is 90 μ m × 90 μ m, the Z-axis scanning range is 10 μ m, and the vertical noise base is less than 30pm RMS. It can construct real three-dimensional surface morphology and accurately measure height information, distance information, and material properties. The system adopts self sensing probe technology, requiring only 4.5mm space between the electron column and the sample, compatible with most SEM or dual beam systems (SEM/FIB), and does not affect the normal operation of SEM. Can be used in conjunction with FIB, EDX, nanoindentation stage, etc. Suitable for fields such as semiconductor packaging, integrated circuit failure analysis, characterization of lithium battery electrode materials, biomedicine, automotive components, materials science, and university research. Younikon Technology provides professional technical support.


Nanosurf AFSEM vacuum environment atomic force microscope product introduction:

Nanosurf AFSEM Atomic force microscope for vacuum environmentfromGETecandNanosurfprovide,Allowing you to easily combine two powerful analytical tools, atomic force microscopy(AFM)Scanning Electron Microscopy(SEM)Construct a real oneThree dimensional surface morphology enables precise measurement of height information, distance information, and even material properties,But at the same time, it maintained its presenceSEMPositioning within a wide field of viewAFSEMRaise the cantilever beam to the precise position you want to measure. This greatly expands the feasibility of your related microscope measurement and analysis.



Nanosurf AFSEM vacuum environment atomic force microscope product features:

  • Real time in your vacuum environmentAFManalysis

  • Convenient integration inSEMRelated activities in the middleAFManalysis

  • Compatible with most electron microscopes without affectingSEMNormal operation

  • Compatible with vacuum chamber environment and atmospheric environment measurement

  • Easy to operate and intuitive



Nanosurf AFSEM vacuum environment atomic force microscope product advantages:

Real time AFM analysis in your electron microscope

atomic force microscope(AFM)Scanning Electron Microscopy(SEM)Complementing each other can make it possible to uniquely characterize your sample.AFSEMIt allows you to simultaneously perform high-resolution imaging of your sample, construct a realistic three-dimensional surface morphology, and accurately measure height information, distance information, and even material properties,But at the same time, it maintained its presenceSEMPositioning within a wide field of viewAFSEMRaise the cantilever beam to the precise position you want to measure. optimizedAFSEMworkflow(does not affectSEMNormal operation)Ensure efficient operation,Powerful control software can achieve intelligent measurement, system operation, and data analysis.


SEM-AFM correlation analysis

For product or material analysis,We always expect to use multiple techniques for sample analysis and seek correlations between parameters,And like atomic force microscopy(AFM)with scanning electron microscopy(SEM)We hope to analyze this type of imaging technology at the same accurate location!


Multiple other analytical techniques tools synchronized with AFM and SEM

becauseAFSEMThe design maintains everythingSEMFunctionally, it can be combined with other standardsSEMAnalytical techniques such asFIBFEBIDandEDXWait, the sample does not need to be scanned, and relatively heavy or customized sample stages, such as tension pulling stages, nanoindentation stages, etc., can be easily combinedAFSEMIn the middle.


Compatible with most electron microscopes without affectingSEMNormal operation

AFSEMSuitable for mostSEMOr dual beam system(SEM/FIB):It is directly installed on the door of the system chamber,Without changing the sample stage itself. And the narrow needle tip scanning design, combined with the self sensing probe system, only requires4.5 mmSpace is sufficient. SoAFSEMIt is compatible with most standard and optional sample stages, and can handle almost any sample that can be placed in the system chamber. This design can achieve sub nanometer level step height measurement in electron microscopy.


Easy to operate and intuitive

AFSEMProvides operational flexibility and intelligent positioning,Three axis coarse positioning table moving probe entering or leavingSEMPosition the probe in the field of view and locate it at the location of interest, SEMThe sample table moves the sample horizontally for convenienceAFSEMandSEMmeasurement:In the vertical direction, AFMCan move together with the sample,It allows you to safely move the sample up and down without damaging itAFMProbe. By using a customized adapter board and circuit seal, it is possible toSEMImplementation withinAFSEMInstallation of, AFSEMIt can be installed or removed with just four screws,The entire process can take less than five minutes and can be quickly and conveniently integrated or removed from the system. The probes are pre installed on a standard interface, allowing for quick replacement of probes,Therefore, it greatly saves the system'sdownMachine time. Because of self sensing probe technology and fully automated probe positioning adjustment, AFSEMThe system can start operating soon.



Nanosurf AFSEM Atomic Force Microscope Components and Accessories for Vacuum Environment:

  • AFSEM measuring head

  • AFSEMTool set (including probe)

  • positioningAFSEMMeasuring head usedXYZsample stage+SEMCustomized adapter plate and sealing flange

  • Controller, high-voltage amplifier, computer (in one control cabinet)+software

  • AFSEMprobe



Nanosurf AFSEM Common measurement modes for atomic force microscopy in vacuum environment:

Static force imaging

Dynamic force imaging

Phase imaging

Conductive Atomic Force Microscope(C-AFM

Force spectrum measurement

Force modulation imaging




Nanosurf AFSEM Atomic Force Microscopy Image in Vacuum Environment:

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