KLA iMicro Nanoindentation Instrument
The KLA iMicro nanoindentation instrument provided by Unicon Technology comes standard with InForce 1000 electromagnetic drive actuator, with a maximum load of 1N, displacement resolution of 0.004nm, maximum indentation depth of 80 μ m, data acquisition rate of 100kHz, and a time constant as low as 20 µ s. It can measure the hardness and elastic modulus of various materials from soft polymers to hard metals/ceramics. The system supports extended functions such as nanoindentation, scratch testing, continuous stiffness measurement (CSM), NanoBlitz 3D/4D mechanical property imaging, and high-temperature nanoindentation, in compliance with ISO 14577 standard. The InView software package provides intuitive testing settings and data analysis. It is suitable for semiconductor, PVD/CVD hard coating (DLC, TiN), MEMS, metal/alloy, ceramic/glass, polymer/biomaterials, gel, composite materials, battery energy storage, pharmaceutical, automotive and aviation industries. Younikon Technology provides professional technical support.
KLA iMicro Nanoindentation Tester Product Introduction:
KLA iMicro nanoindenterCan easily measure hard coatings, films, and small amounts of materials. This instrument is accurate, flexible, and user-friendly, and can provideIndentation, hardness, scratches, and universal nanoscale testingWaiting for various nanoscale mechanical tests.Interchangeable drivesIt can provide a large dynamic range of force loads and displacements, enabling researchers to conduct detailed and reproducible tests on materials ranging from soft polymers to hard metals and ceramics. The modular option is suitable for various applications:Material property distribution, specific frequency testing, scratch and wear testing, and high temperature testing.KLA iMicro nanoindenterHaving a complete set of testing extension options, including sample heating, continuous stiffness measurementNanoBlitz3D/4DDistribution of properties, andGemini2DForce load sensors can provide friction and other biaxial measurements.
Advantages of KLA iMicro Nanoindentation Tester:
modular design,It has both broad testing functions and high-throughput automated testing capabilities, and is equipped with a statistical data analysis package, suitable for nanomechanical performance measurement, scanning probe microscopy imaging, high-temperature measurement, and moreIVReal time and experimentally controlled testing of voltage and current characteristics, development of a simple and easy-to-use testing process, and setting of testing parameters.
standardInForce1000Electromagnetic drives provide up to1NThe driving force.
Integrating high-speed controller electronic devices to complete high-speed data acquisition100kHzCapture the instantaneous response of materials, such as serrated rheology and fracture phenomena. The instrument uses a shorter time constant20μsCapture the real-time response of the material in an instant.
A high stiffness framework integrated with noise isolation function ensures accurate measurement of various materials.
Digital zoom high-resolution optical microscope for accurate positioning of samples.
Nanoindentation experts teach professional nanoindentation courses online, and mobile applications can provide real-time updates on testing methods.
Measurement principle of KLA iMicro nanoindentation instrument:
KLA iMicro nanoindenterUsing a diamond indenter with a specific geometric shape to statically press the load onto the material surface, and recording the loading in real-time-Load and depth changes during unloading process, generatingload-Displacement curveBy combining curve analysis with mechanical models, calculate parameters such as nanohardness and elastic modulus of the material.
The main applications of KLA iMicro nanoindentation tester are:
Hardness and modulus measurement (OliverPharr)
Mechanical characterization is crucial in the processing and manufacturing of thin films, including coating quality in the automotive industry and process control in the front and back stages of semiconductor manufacturing.KLA iMicro Nanoindentation can measure the hardness and modulus of various materials from ultra soft gel to hard coating. The high-speed evaluation of these characteristics ensures quality control on the production line.
Distribution of properties of high-speed materials
For many materials, including composite materials, their mechanical properties may vary depending on the location.KLA iMicro nanoindenterThe sample platform can be accessed onXaxis sumYAxial movement100mmAnd inZAxial movement25mmThis makes the system applicable to different sample heights and capable of measuring over a large sample area. optionalNanoBlitzMorphology and tomography software can quickly draw color distribution maps of any measured mechanical properties.
ISO14577 Hardness Testing
KLA iMicro nanoindenterIncluding pre writtenISO14577Testing method, capable of measuring compliance withISO14577Standard material hardness. This testing method automatically measures and reports Young's modulus, instrument hardness, Vickers hardness, and standardized indentation.
Polymer TanDelta, storage and loss modulus
KLA iMicro nanoindenterCapable of measuring ultra soft materials including viscoelastic polymerstandeltaAnd storage and loss modulus. Storage and loss modulustandeltaIt is an important characteristic of viscoelastic polymers, where energy is stored as elastic energy and dissipated as heat. Both of these indicators are used to measure the energy consumption of a given material.
Quantitative scratch and wear testing
KLA iMicro The nanoindentation instrument can perform scratch and wear tests on various materials. Coatings and films will undergo chemical mechanical polishing（CMP）Multiple processes such as wire bonding test the strength of the film and its adhesion to the substrate. It is important that these materials resist plastic deformation in these processes and remain in their original state without substrate blistering. Ideally, dielectric materials should have high hardness and elastic modulus, as these parameters help determine how the material will react during the manufacturing process.
High temperature nanoindentation test
Nanoindentation at high temperatures is crucial for characterizing material properties under thermal stress, particularly for quantifying failure mechanisms in thermomechanical processes. Changing the sample temperature during mechanical testing can not only measure the behavior changes caused by heat, but also quantify the transition plasticity of materials that are difficult to test at the nanoscale.
KLA iMicro Nanoindentation Instrument Industry Applications:
hard coating | medical device | Ceramics and Glass |
Metals and alloys | Batteries and energy storage materials | Composite materials |
semiconductor | Automotive and Aerospace | Coatings and paints |
Technical advantages of KLA iMicro nanoindentation tester:
Continuous stiffness measurement（CSM）
NanoBlitz3DRapid mechanical performance distribution
NanoBlitz4DMechanical performance tomography
ProbeDMPolymer testing
AccuFilThin film method
three hundred°CSample heating
International standardized nanoindentation testing
KLA iMicro Nanoindentation Tester Upgrade Options:
Scratch and Wear Test Options
Scratch and wear testing can be used to characterize various materials such as thin films, brittle ceramics, and polymers by applying a constant or increasing longitudinal load to the probe as it passes through the sample surface.
Biological soft material testing options
Biological material testing method utilizing continuous stiffness testingCSMCharacterizing modulus in1kPaThe left and right biological soft materials include a flat bottomed indenter and a testing method for measuring the storage loss modulus of the soft material,
DataBurst Test Options
DataBurstMode in Da100kHzTrigger data collection at high speeds to capture the instantaneous response of materials, such as serrated rheology and fracture phenomena; Allow measurement of mechanical properties of high strain rate materials under step loading; The instrument uses a shorter time constant to help customers capture the instantaneous real response of the material.
InView Open Software Writing Platform
InViewAdopting an open software development platform to assist customers in achieving complete control over loading, measurement, and computation during the testing process. Used for designing novel or complex experiments. Open software development platforms provide customers with greater flexibility: helping them easily collect raw test data and fully utilize the final analysis results; Customers can fully browse, edit calculation formulas, customize parameters, and achieve personalized experimental design; Users can freely design and change experimental parameters and processes, providing possibilities for exploring new experimental tests.
TrueTestI-V electrical testing
TrueTestI-VThe option allows users to apply a specific voltage to the sample and measure the current of the indenter to characterize the local changes in electrical properties during nanomechanical measurements.
Active vibration isolation with modular rack
inKLA iMicro On the basis of the built-in passive isolation of the nanoindentation instrument, active isolation is added to provide good stability and accuracy for achieving high difficulty nanomechanical measurements such as ultra-thin films. The active isolation system reduces vibrations in all six degrees of freedom without the need for adjustment.
High precision linear optical encoder platform
Linear optical encoder(LOE)Option, improves the positioning accuracy of the testing process, used for micro structure positioning.
Pressure probe and calibration sample
InForce50、InForce1000andGeminiThe interchangeable pressure head of the driver includesBerkovichStereoscopic angles, Vickers, as well as flat bottomed and spherical indenters.
KLA iMicro Measurement diagram of nanoindentation instrument:
