HERZ AVI-400 Series Active Seismic Isolation System | Active+Passive Dual Mode Vibration Isolation

HERZ AVI-400 series active shock absorption system

Name: HERZ AVI-400系列 主动式防震系统
Brand: HERZ
Availability: InStock

Active+passive dual-mode isolation | 0.7Hz~200Hz active isolation | No low-frequency resonance | No need for air pressure support | Load up to 800kg

HERZ AVI-400主动式防震系统

0.7Hz

Active isolation starting point

90%

2Hz isolation rate

95%

5Hz isolation rate

<0.01

Transmission rate above 10Hz (-40dB)

<20ms

response time

800kg

Maximum load capacity

产品介绍

HERZ AVI-400系列主动式防震系统 Adopting '; Active+Passive; Dual mode isolation technology, active isolation range 0.7Hz~200Hz, passive isolation range>200Hz, can isolate vibration interference in six spatial directions. The system is equipped with a built-in piezoelectric acceleration sensor and voice coil motor, which can detect incoming vibrations in real time and generate reverse compensation force. The response is completed within 5-20 milliseconds, with a transmission rate of less than 0.01 (-40dB) above 10Hz, no low-frequency resonance, and no need for air pressure support.

Modular design supports free expansion, with a maximum load capacity of over 800kg. Desktop size and number of isolation modules can be configured as needed. LCD display screen monitors vibration status in real-time, plug and play, easy to install. Suitable for various high-precision equipment such as scanning electron microscopy (SEM), transmission electron microscopy (TEM), atomic force microscopy (AFM), scanning probe microscopy (SPM), lithography machines, laser interferometers, spectrometers, profilometers, electronic balances, etc.

technology benchmark

Superior to passive isolation systems, no low-frequency resonance, vibration recovery time<10ms, no need for air pressure, no electromagnetic interference, modular and scalable

核心优势

主动+被动双模隔振

The active module specializes in low-frequency vibration compensation from 0.7 to 200Hz, while the passive module absorbs high-frequency vibrations above 200Hz, achieving full frequency isolation.

Nothinglow-frequency resonance

Thoroughly eliminate the common low-frequency resonance peaks of passive seismic platforms, ensure stable operation without secondary interference, and guarantee imaging clarity.

Instant response

The piezoelectric sensor collects vibration in real time, and the voice coil motor outputs reverse compensation force within 5-20ms. The transmission rate above 10Hz is less than 0.01 (-40dB).

无需气压支持

Pure active control technology, no need for gas source, air compressor or air flotation components, plug and play, extremely simplified installation and maintenance.

Modular and scalable

Supports single module to multi module combinations, with a maximum load of 800kg+. Desktop size and number of isolation modules can be configured as needed.

real-time monitoring

The LCD display screen displays the vibration status and isolation effect in real time, without the need for additional software, allowing for an intuitive understanding of the environmental vibration level.

Applicable equipment and industry

Scanning Electron Microscope (SEM)

Transmission Electron Microscopy (TEM)

Atomic Force Microscopy (AFM)

Scanning Probe Microscope (SPM)

Lithography machine/EBL

laser interferometer

Spectrometer/Proformer

High precision electronic balance

Semiconductor testing equipment

Ultra high vacuum SPM

Compatible with mainstream brands such as Zeiss, Leica, Hitachi, NEC, FEI, and various precision instruments.

working principle

The AVI-400 relies on a built-in piezoelectric acceleration sensor to monitor vibration signals on the platform in real-time, and quickly analyze vibration waveforms and frequencies through an intelligent controller. The controller instructs the voice coil motor driver to generate a reverse force that is opposite in phase and has the same amplitude as the interference vibration, actively canceling out external vibration interference. The system adopts a six degree of freedom control algorithm, adaptive foundation vibration feedforward, and all-round blocking of horizontal, vertical, and torsional vibration transmission. Combining passive isolation modules to absorb high-frequency residual vibrations, achieving full range isolation protection starting from 0.7Hz.

产品参数

Product Series	AVI-400M / AVI-400LP Plus	品牌	HERZ (Table Stable)
Active isolation frequency band	0.7Hz ~ 200Hz	Passive isolation frequency band	>200Hz
Vibration isolation degree of freedom	Six degrees of freedom (horizontal/vertical/torsional)	Transmission rate (@ 10Hz)	<0.01 (-40dB)
2Hz isolation rate	≥90%	5Hz isolation rate	≥95%
response time	5 ~ 20ms	低频共振	无
Maximum load capacity	800kg+(modular expansion)	pressure requirement	No gas source required
sensor type	Piezoelectric accelerometer	driving component	Voice coil motor
Control method	Adaptive feedback+feedforward control
status monitoring	Real time display on LCD screen
Installation method	Plug and play, no tools required, no change in device appearance
For more customized parameters and load configurations, please consult Younikon Technology

Comparison of Seismic Effects

防震前

After earthquake prevention

Comparison of Active Vibration Isolation Effects: Effectively Eliminating the Interference of Low Frequency Vibration on High Resolution Imaging

安装实例

AVI-400M/LP Plus and ZEISS Sigma 500

AVI-400M/4/LP Plus and FEI TEM

客户评价

After installing the AVI-400, the vibration noise of our Zeiss Sigma 500 during high magnification imaging was significantly eliminated. The design without pressure requirements makes installation extremely convenient, and the real-time display of vibration isolation status on the LCD screen is clear at a glance. ”

——Material characterization laboratory electron microscopy platform

TEM is extremely sensitive to low-frequency vibrations, and the 0.7Hz active isolation of AVI-400 perfectly solves the problem of image jitter when the subway passes by. Modular design allows for flexible expansion, and subsequent equipment additions only require the addition of vibration isolation modules. ”

——Semiconductor R&D Center Analysis and Testing Department

常见问题

What are the main differences between the AVI-400 series and passive shock absorbers?+

Active shock resistance generates reverse force in real-time through sensors and drivers to counteract low-frequency vibrations (0.7-200Hz), without low-frequency resonance peaks; Passive shock absorption relies on elastic materials to absorb high-frequency vibrations. AVI-400 integrates active and passive dual-mode, achieving full frequency band isolation without the need for air pressure support.

Does AVI-400 require an external air source or compressor?+

No need. The AVI-400 adopts pure active control technology and does not require any air pressure or air flotation components. It only needs to be connected to a standard power supply to work, plug and play.

What is the maximum load capacity? Can it be customized?+

The standard model has a maximum load capacity of 800kg and adopts a modular design. The load capacity can be further improved by adding vibration isolation modules. Desktop size and module quantity can be configured as needed, supporting customized customization for a single device.

Will installation affect the original structure and warranty of the equipment?+

No impact. The AVI-400 adopts a compact modular design, which is directly carried at the bottom of the equipment without changing the appearance and overall structural contour of the microscope, without the need for drilling or modification, and does not affect the original factory warranty of the equipment.

How to monitor the vibration isolation effect of AVI-400 in real time?+

The system is equipped with an LCD display screen, which can display the current vibration level and isolation status in real time, and can intuitively grasp the environmental vibration situation without connecting to a computer or additional software.

Free on-site vibration assessment service

Free On-site Vibration Assessment

Not sure if your laboratory environment meets the requirements for electron microscopy operation? We provide free on-site vibration measurement and evaluation services! Professional engineers carry vibration analyzers to measure on-site, quantify environmental vibration levels, and provide targeted active vibration isolation solutions.

Appointment for on-site vibration assessment Message acquisition plan

Tags: HERZ 减震台