HERZ AVI-600 series active shock absorption system
The HERZ AVI-600 series active vibration reduction table provided by Unicon Technology adopts "active+passive" dual-mode vibration isolation technology, with an active isolation range of 0.5-200Hz and a passive isolation range>200Hz, which can isolate vibration interference in six spatial directions. The system is equipped with a built-in piezoelectric acceleration sensor and piezoelectric transducer, which can detect incoming vibrations in real time and generate reverse compensation force. The response is completed within 5-20 milliseconds, with a transmission rate of less than 0.017 (-35dB) above 10Hz, no low-frequency resonance, and no need for air pressure support. Modular design supports free expansion, with a single isolation module capable of supporting a load capacity of 600kg and a load range of 0-1200kg. By increasing the number of isolation modules, the load capacity can be increased to 5400kg, and the system size and configuration can be customized as needed. AVI-600 provides different specifications of vibration isolation modules such as M (720 × 288 × 112.5mm), S (396 × 288 × 112.5mm), XL, etc., suitable for various large precision instruments. Suitable for scanning electron microscopy (SEM ), transmission electron microscopy (TEM), ultra-high vacuum scanning probe microscopy (UHV-SPM ), lithography equipment, high-precision metrology tools, large interferometers, profilometers, spectrometers, and large semiconductor equipment. Younikon Technology provides professional technical support and on-site installation services.
Product Details
| model | Isolation module size (per module) | Load capacity (per module) | Load range |
| AVI-600M | Length x width x height: 720x288x112.5mm | 0-600kg | 0-1200kg |
| AVI-600S | Length x Width x Height: 396x288x112.5mm | 0-600kg | 0-1200kg |
HERZ AVI-600 work station Active isolation table
HERZ AVI-600 is a compact active isolation system that provides a solution for large-scale instrument isolation in nanotechnology. It is a good choice for upgrading and integrating into existing equipment that requires low-frequency isolation function. HERZ AVI-600 work station can freely choose the size and configuration of the entire system, and increasing the number of isolation modules can increase the system's load-bearing capacity (up to 9000 pounds).
working principle
The AVI series active isolation table adopts special isolation technology and is suitable for any scientific research environment. The isolation module can isolate vibrations in 6 spatial directions (including horizontal and vertical directions). The AVI series active isolation table uses a piezoelectric acceleration sensor in the controller to convert the pressure signal of external vibrations into an electrical signal and send it to the piezoelectric transducer in the isolation module. Then, the piezoelectric transducer will generate a pressure signal equal in magnitude to the incoming pressure but opposite in direction to eliminate the incoming vibration. The isolation system utilizes a feedback loop to eliminate mechanical resonance in the isolation system.
Product Features
Active isolation frequency 1Hz-200Hz
Passive isolation frequency>200Hz
Response time of 5-20ms
Easy to install and use
High stability, able to use continuously for many years without any faults
Compact and modular multifunctional design
Controller with digital LED display screen
Product Application
| SEM | TEM | UHV-SPM | photolithography |
| Tunnel microscope | Fabry Perot interferometer | Large vibration sensitive instruments and equipment | more. . |
performance advantage
The system actively detects input vibrations and dynamically eliminates them
Free isolation in six spatial directions
Internal feedback loop control of mechanical resonance in the system
Good low-frequency isolation performance
No low-frequency resonance, no air requirements
Technical specifications |
|
| Isolation range | Active: 1-200Hz; Passive:>200Hz |
| Transmission rate | Exceeding 10Hz<; 0.017（ -35 dB） |
| Module size | W 11.3” x D 28.4” x H 4.5” (AVI-600) |
| Module weight | 60 KG / 132 Lbs |
Static flexibility (per module) |
|
| vertical direction | About 12 μ m/N |
| horizontal direction | About 6 μ m/N |
| system noise | Below 50nG/√ Hz |
| power consumption | Normally 27 W (standard) |
| input voltage | 90 - 125 VAC / 200 - 250 VAC, 50 - 60 Hz |
| Controller size | 48 x 13 x 25 cm / 19 x 5.1 x 9.8” |
| performance monitoring | Indicate whether each sensing part is isolated by displaying a multiple signal on the oscilloscope |
