Filmetrics F50 Automatic Mapping Film Thickness Gauge
Fully automatic film thickness mapping system - polar coordinate positioning, 2 points per second, visualized 2D/3D thickness distribution map
5nm～2mm Thickness measurement range | 0.02nm measurement accuracy | 2 points per second scanning speed | 450mm Maximum sample diameter |
Product Introduction
Filmetrics F50 Automatic Mapping Film Thickness Gauge It is a fully automatic film thickness mapping system designed specifically for production lines and research and development. Using a high-precision r - θ polar coordinate moving platform, it is possible to quickly locate any measurement point on a sample with a diameter of 450mm, complete thickness testing at 2 points per second, and automatically generate intuitive 2D or 3D thickness distribution maps. As an efficient automatic film thickness measuring instrument, F50 not only supports custom measurement point maps, but also easily handles thousands of repeated measurements. It is an indispensable automatic film thickness testing equipment in fields such as semiconductor film thickness measurement and optical coating uniformity detection.
industry recognitionFilmetrics F50 Based on the proven F20 series optical film thickness measurement technology, upgraded specifically for fully automatic mapping needs, it has been widely deployed in the production lines and laboratories of numerous semiconductor and optoelectronic companies worldwide, becoming one of the standard configurations for automatic thin film thickness detection.
Product Features
Fully Automated MappingThe built-in r - θ polar coordinate platform automatically moves the sample for multi-point film thickness measurement, quickly obtaining the thin film thickness distribution data of the entire sample, making it a truly automated film thickness measurement system.
High speed and high precisionThe scanning speed can reach up to 2 points per second, while maintaining a measurement accuracy of 0.02nm, balancing the efficiency of film thickness mapping and data reliability, meeting the requirements of rapid film thickness detection on the production line.
2D/3D VisualizationAutomatically generate 2D or 3D thickness distribution maps, making the uniformity of film thickness clear at a glance and providing intuitive basis for process optimization.
Flexible point editingUsers can freely draw measurement point maps, support any position and any number of test points, and achieve true film thickness mapping and free editing.
Long term stability and reliabilityEquipped with a high-precision and long-life mobile platform, designed for thousands of repeated measurements with extremely high stability, it is suitable as an online film thickness measurement device for production lines.
Measuring principle
F50 uses the same principle of light reflection interference as F20 for non-contact film thickness measurement. The incident light reflects and interferes on the upper and lower surfaces of the thin film to form an oscillating spectrum, and the film thickness and optical constants are accurately calculated by analyzing the spectral frequency. On this basis, F50 moves the sample through a high-precision automatic platform, measures it one by one according to preset points, and finally synthesizes the film thickness distribution map of the entire sample, which is a typical application of optical film thickness measurement technology automation.
Applicable film types
Film characteristics:Thickness, reflectivity, transmittance, optical constant, uniformity, etc
Film type:Transparent and semi transparent films, such as oxides, nitrides, polymers, photoresists, ITO, etc
Film state:Solid, liquid, and gaseous thin films can be measured
Thin film structure:Single layer film, multi-layer film; Flat sample
Common industrial applications
Semiconductor film layer | display technology | Optical coating | Perry Lin/Biomedical |
Uniformity of photoresist | OLED film layer | Anti reflective film | Medical Device Coatings |
dielectric layer | ITO transparent electrode | optical filter | Electronic products/circuit boards |
CVD/PVD coating | LCD box thickness | solar cell | magnetic material |
Product Parameters
wavelength range | 190nm-1340nm | light source | Tungsten halogen lamp, deuterium lamp |
Thickness measurement range | 5nm～2mm | measurement accuracy | 0.02nm |
spot size | Standard 1.5mm | Sample table size | 1mm～300mm |
scanning speed | About 2 o'clock/second |
Contact us for more parameters and customization information |
F50 Series Selection Guide
| model | thickness range | wavelength range | Typical Applicable Scenarios |
|---|
| F50-UV | 5nm～40μm | 190～1100nm | Ultra thin film mapping (OLED, photoresist) |
| F50-UVX | 5nm～250μm | 190～1700nm | Wide spectrum ultra-thin mapping |
| F50 | 20nm～70μm | 380～1050nm | Universal type (semiconductor, polymer) |
| F50-EXR | 20nm～250μm | 380～1700nm | Thick film layer mapping (optical coating) |
| F50-NIR | 100nm～250μm | 950～1700nm | Near infrared film thickness mapping |
| F50-XT | zero point twoμm～450μm | 1440～1690nm | Specialized for infrared thick film |
| F50-s1310 | 7μm～2Mm | 1280～1340nm | Ultra thick film, specific material |
Not sure which model to choose?Contact an engineer to recommend for you
Display of actual test data
Customer reviews
The F50 automatic Mapping film thickness measurement system has increased the efficiency of our wafer film uniformity detection by nearly 10 times. The polar coordinate platform has accurate positioning, with one point per 2 seconds. The entire wafer can be scanned in just a few minutes, and the automatically generated 3D thickness distribution map is very intuitive. It is strongly recommended for colleagues who need film thickness mapping. ”
——Quality Department of a semiconductor wafer foundry
We mainly use F50 for uniformity testing of optical coatings, and the custom measurement point function is very practical. It can perform dense sampling on the edges and centers of the coating, quickly judge the consistency of the film thickness of the entire furnace product, and has become a key equipment for our coating process control. ”
——Research and Development Department of a Precision Optical Coating Enterprise
Frequently Asked Questions (FAQ)
How does the F50 automatic Mapping film thickness measuring instrument work?
F50 automatically moves the sample through the r - θ polar coordinate moving platform, uses the principle of light reflection interference to measure film thickness at each user preset measurement point, and summarizes all data to generate 2D or 3D thickness distribution maps, achieving fully automatic film thickness mapping.
What is the scanning speed of F50? How large samples can be measured?
The scanning speed of F50 is about 2 points per second, and the maximum measurable sample diameter is up to 450mm. For conventional mapping with dozens of points, the film thickness detection of the entire sample can be completed within a few minutes.
Can F50 customize measurement points?
Okay. Users can freely draw point maps in the software, supporting any position and any number of measurement points, achieving fully customized film thickness mapping to meet the detection needs of different products.
Is the measurement accuracy of F50 the same as F20?
Yes, the F50 inherits the high-precision measurement capability of the F20 series at 0.02nm, but adds an automatic Mapping function, so there is no compromise on accuracy and it is a reliable automatic film thickness measurement system.
Is F50 suitable for online production lines?
Very suitable. The F50 adopts a long-life mobile platform designed specifically for large-scale repeated measurements. The software can set up automated measurement sequences, making it very suitable for online film thickness detection and quality control on production lines in industries such as semiconductor and optical coating.
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Free Sample Testing Service
Not sure if your sample is suitable for F50 automatic mapping measurement? We offer free sample testing services! Send us the samples, and our engineers will conduct Mapping testing for you using F50 and provide a detailed thickness distribution report.
