HORIBA Auto SE Elliptical Polarization Spectrometer

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The HORIBA Auto SE one key fully automatic fast ellipsometer provided by Unicon Technology uses liquid crystal modulation technology to measure the optical path without mechanical rotating parts, with a spectral range of 450-1000nm and a single measurement time of only 1-5 seconds. Equipped with MyAutoView spot visualization technology, it can clearly observe smooth or rough sample surfaces, automatically remove reflected signals from transparent samples, and offer a variety of spot sizes ranging from 25 µ m to 500 µ m. The size of the automatic sample table is 200mm × 200mm, supporting automatic mapping scanning to analyze the uniformity of sample coating. The DeltaPsi2 software has built-in rich modeling and fitting functions, with measurement accuracy of PSI=45 °± 0.05 °, Δ=0 °± 0.2 °, and thickness repeatability of ± 0.1 Å. Suitable for semiconductor wafers (photoresist/oxide/nitride film), optical coatings (anti reflective film/hard coating), flat panel displays (ITO/TCO transparent conductive film), photovoltaic solar energy, polymers, and organic materials. Younikon Technology provides professional technical support.

HORIBA Auto SE Elliptical Polarization Spectrometer Product Introduction:

HORIBA Auto SE Elliptical Polarization SpectrometerIt is a new type of thin film measurement tool. With just a few simple buttons, sample measurement and analysis can be automatically completed within seconds, and a complete report of film characteristic analysis can be provided, including film thickness, optical constants, surface roughness, film non-uniformity, reflectivity or transmittance. It is a solution for rapid thin film measurement and device quality control. Specially designed for thin film measurement, one click operation achieves high efficiency.

HORIBA Auto SE Elliptical Polarization Spectrometer Product Features:

can be450nm~1000nmRealize fast measurement within the wavelength range（<1Seconds)
Multiple software options for spot size selection
Automatic loading and adjustment of sample height (requires an automatic platform)
Large area automatic imaging (requires an automatic platform)
Temperature control table, liquid sample pool, electrochemical reaction pool
Various accessories such as sealed gas pool, transmittance curve measurement, etc

HORIBA Auto SE Elliptical Polarization Spectrometer Product Advantages:

Spot visualization system：HORIBA Auto SE Elliptical Polarization SpectrometerpossessMyAutoViewSpot visualization system can clearly observe smooth or rough sample surfaces, ensuring that users can accurately locate the measurement spot at the measurement position on the sample target.

Large sample imaging options：HORIBA Auto SE Elliptical Polarization SpectrometerEquipped with an automatic platform, it is convenient to locate and measure the position of microstructures on the sample, and can perform measurements on uneven large sample piecesmappingImaging.

Intelligent Diagnosis：HORIBA Auto SE The maintenance of the ellipsoidal spectrometer instrument is very simple. With the help of a complete operation guide, it can automatically detect and diagnose problems, and handle faults

HORIBA Auto SE Elliptical Polarization Spectrometer Product Measurement Principle:

HORIBA Auto SE ellipsometer It is a non-contact measurement method that utilizes the optical properties of thin films to measure film thickness. Measure the thickness and refractive index of thin films based on the state changes during polarized light reflection or transmission. When polarized light is irradiated onto the surface of a thin film, the polarization state of reflected or transmitted light will change, which depends on the thickness, refractive index, and polarization state and angle of the incident light of the film. By analyzing these changes, the thickness of the film can be accurately derived.

HORIBA Auto SE Elliptical Polarization Spectrometer Software:

HORIBA Auto SE Elliptical Polarization Spectrometer SoftwareDeltaPsi2Powerful functionality, based onWindowsTOperating system, fully utilizingHORIBA Scientific（JobinYvonThe advantages of spectroscopic ellipsometer hardware technology include numerous modeling and fitting processing functions, as well as a simple operating interface, which can provide researchers with convenient ellipsometry analysis methods.

Gradient membrane layer
Roughness or interface
material composition/crystallinity
Anisotropic film layer
Non-uniformity of film thickness
Depolarization factor
Complete attribute database related to material model formulas
Automatic correction of background light for thick transparent sample substrates
Cyclic structure
User's ultra-thin film applicationBLMCalgorithm
Multiple guesses, multiple initial values, multiple models, correlations

HORIBA Auto SE Elliptical Polarization Spectrometer Common Applications:

interface characteristics	Surface measurement	optical properties	thickness measurement
Amorphous silicon, polycrystalline silicon	roughness	Optical constant（n，k）	From a few angstroms to15um
Nanocrystalline silicon	Natural oxide thickness	optical band gapEg	Single layer and multi-layer films
Transparent conductive oxide	Surface film thickness	transmittance
anti-reflection coating	Depolarization coefficient
semiconductor	Tablet display	Functional coatings	Biological and Chemical Engineering
Dielectric film	TFT	optical coating	Organic thin film
metal film	OLED	Anti reflective and self-cleaning types	Thin film adsorption
Polymer, photoresist	Plasma display panel	Surface coating and treatment	Surface functional treatment
PZTmembrane	Flexible display panel	organic materials

HORIBA Auto SE Elliptical Polarization Spectrometer Product Parameters:

spot size	500µmX500µm,250µmX250µm, 100µmX100µm,250µmX500µm, 70µmX250µm,50µmX60µm, 25µmX60µm*
Testing time:	5s，Max1s	Visual system:	MyAutoView
Psi，Delta Test accuracy:	Ψ=45°±0.05°-Δ=0°±0.2°	Refractive index repeatability	n±0.001(1σ)
Thickness repeatability:	d±0.1Åor0.01%(1σ)	Sample table size:	200mm-200mm