HORIBA Smart SE Elliptical Polarization Spectrometer
The HORIBA Smart SE intelligent multifunctional ellipsometer provided by Younikon Technology adopts liquid crystal modulation technology, with a spectral range of 450-1000nm, multi angle measurement capability, and supports flexible switching between online and offline configurations. Equipped with spot visualization technology, any sample surface can be observed. The automatic sample stage size is 200mm × 200mm, and the XYZ direction can be automatically adjusted. It supports automatic mapping scanning analysis of coating uniformity. The CCD detection system achieves fast full spectrum output, with one click operation to directly output reports. It can measure all parameters such as film thickness, optical constants (n, k), surface roughness, film non-uniformity, reflectivity, and transmittance. Suitable for semiconductor (oxide/nitride/photoresist), optical coating (anti reflective film/high reflectivity film), flat panel display, photovoltaic solar energy, polymers, organic materials, biochemistry and other fields, it is an ideal tool for rapid and accurate characterization of single-layer and multi-layer thin films. Younikon Technology provides professional technical support.
HORIBA Smart SE Elliptical Polarization Spectrometer Product Introduction:
HORIBA Smart SE Elliptical Polarization SpectrometerIt is a thin film measurement tool. With just a few simple buttons, sample measurement and analysis can be automatically completed within seconds, and a complete report of film characteristic analysis can be provided, including film thickness, optical constants, surface roughness, film non-uniformity, reflectivity or transmittance. It is a solution for rapid thin film measurement and device quality control. Designed for thin film measurement, with one click operation.
HORIBA Smart SE Elliptical Polarization Spectrometer Product Features:
Fast measurement can be achieved within the wavelength range of 450nm to 1000nm (<1 second)
Multiple software options for spot size selection
Automatic loading and adjustment of sample height (requires an automatic platform)
Large area automatic imaging (requires an automatic platform)
Temperature control table, liquid sample pool, electrochemical reaction pool
Various accessories such as sealed gas pool, transmittance curve measurement, etc
HORIBA Smart SE Elliptical Polarization Spectrometer Product Advantages:
Spot visualization system:HORIBA Smart SE Elliptical Polarization Spectrometer is equipped withMyAutoView Spot Visualization SystemIt can clearly observe smooth or rough sample surfaces, ensuring that users can position the measurement spot at the measurement position on the sample target.
Intelligent diagnosis:HORIBA Smart SE Elliptical Polarization Spectrometer instrument maintenance is very simple. With the help of a complete operation guide, it automatically detects and diagnoses problems, and handles faults
Flexible and multifunctional options:HORIBA Smart SE Elliptical Polarization SpectrometerAdjustable incident angleAnd it can be used for online real-time monitoring, with flexibility.
HORIBA Smart SE Elliptical Polarization Spectrometer Product Measurement Principle:
HORIBA Smart SE EllipsometerIt is a non-contact measurement method that utilizes the optical properties of thin films to measure film thickness. Measure the thickness and refractive index of thin films based on the state changes during polarized light reflection or transmission. When polarized light is irradiated onto the surface of a thin film, the polarization state of reflected or transmitted light will change, which depends on the thickness, refractive index, and polarization state and angle of the incident light of the film. By analyzing these changes, the thickness of the film can be accurately derived.
HORIBA Smart SE Elliptical Polarization Spectrometer Software:
DeltaPsi2, an elliptical polarization spectroscopy software with rich functions, is based on the Windows T operating system and fully utilizes the hardware technology of HORIBA Scientific (JobinYvon spectroscopy technology) ellipsometer. It has numerous modeling and fitting processing functions, as well as a simple operating interface, which can provide researchers with convenient ellipsometry analysis methods.
Gradient membrane layer
Roughness or interface
Material composition/crystallinity
Anisotropic film layer
Non-uniformity of film thickness
Depolarization factor
Complete attribute database related to material model formulas
Automatic correction of background light for thick transparent sample substrates
Cyclic structure
BLMC algorithm for user ultra-thin film applications
Multiple guesses, multiple initial values, multiple models, correlations
HORIBA Smart SE Elliptical Polarization Spectrometer Common Applications:
interface characteristics | Surface measurement | optical properties | thickness measurement |
Amorphous silicon, polycrystalline silicon | roughness | Optical constants (n, k) | From a few angstroms to 15um |
Nanocrystalline silicon | Natural oxide thickness | Optical bandgap Eg | Single layer and multi-layer films |
Transparent conductive oxide | Surface film thickness | transmittance |
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anti-reflection coating | Depolarization coefficient |
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semiconductor | Tablet display | Functional coatings | Biological and Chemical Engineering |
Dielectric film | TFT | optical coating | Organic thin film |
metal film | OLED | Anti reflective and self-cleaning types | Thin film adsorption |
Polymer, photoresist | Plasma display panel | Surface coating and treatment | Surface functional treatment |
PZT film | Flexible display panel | organic materials |
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HORIBA Smart SE Elliptical Polarization Spectrometer Product Parameters:
spot size | 500µmX500µm,250µmX500µm, 250µmX250µm,100µmX250µm, 150µmX250µm,100µmX500µm, 75µmX150µm |
Testing time: | 5s，Max1s | Visual system: | MyAutoView |
More parameters can be obtained by contacting us |
HORIBA Smart SE Elliptical Polarization Spectrometer Measurement Image:
