KLA P-7 probe based step meter | sub angstrom resolution probe based surface profilometer

High precision contact step measurement system - one-stop characterization of step height, roughness, warpage, and film stress from nanometer to millimeter level

1nm ~ 1000µm Measurement range of step height	0.01Å Vertical resolution (sub angstrom level)	0.03~50mg Micro force constant force control	150mm Full diameter scanning (no need for splicing)

产品介绍

KLA P-7 probe type step meter (surface profilometer) It is a cost-effective desktop probe profile analysis system launched by KLA based on the popular platform P-17 technology. Adopting the principle of diamond probe contact scanning and integrating LVDC sensor technology, precise measurement of step height, surface roughness, warpage, and film stress from nanometer to 1mm is achieved. Vertical sub angstrom resolution (0.01 Å), constant force control range of 0.03~50mg, scanning range up to 150mm without image stitching.KLA P-7 probe based surface profilometerWidely applicable to semiconductor wafers, compound semiconductors MEMS、LED、 Industries such as solar cells, precision optics, flexible electronics, and automotive electronics meet the diverse surface morphology characterization needs from research and development laboratories to fully automated production lines. Younikon Technology provides professional technical support and prototype demonstration services.

Industry benchmark trusted choice

KLA probe profilometer With over 30 years of technological accumulation, thousands of semiconductor and optoelectronic companies around the world use KLA step meters as the standard for film thickness/morphology testing. The P-7 series inherits the high-precision measurement performance of KLA, with a repeatability of 4 Å (0.10%), and is widely recognized in fields such as compound semiconductors, advanced packaging, and MEMS. Combining powerful Apex analysis software and automation options to provide reliable data support for production lines and research and development.

产品特点

Ayer resolution& Wide range The vertical resolution is as high as 0.01 Å, and the measurement range of step height covers several nanometers to 1000 µ m. It can accurately characterize atomic layer deposition, photoresist steps, etching depth, and thick film steps.
Constant Micro Force Control Technology Dynamic force control of 0.03~50mg, extremely low needle pressure can protect soft materials (photoresist, flexible films, OLED materials) while ensuring measurement repeatability of hard materials.
Large stroke non-destructive splicing 150mm full diameter scanning capability, capable of completing full domain characterization of samples of 6 inches and below without image stitching, supporting 2D/3D contour, roughness, and stress warping analysis.
Intelligent automatic measurement Integrated with a 5-megapixel high-definition camera, pattern recognition, and SECS/GEM functions, it can automatically measure sequences, process data in batches, and meet the full automation requirements of production lines.
Powerful analysis software Apex Provide extended algorithms such as leveling, filtering, step height, roughness (ISO/ASME), stress calculation, etc., supporting 3D imaging and custom report output.

测量原理

The KLA P-7 probe type step meter adopts LVDC (linear variable differential capacitance) sensor technology. The probe is in physical contact with the sample surface, and the sensor senses the vertical displacement of the probe with the surface morphology, converting the capacitance change into high-precision terrain signals. LVDC design has the advantages of small mass, linear motion, low hysteresis, and extremely low friction. Combined with closed-loop force feedback, it ensures constant needle pressure throughout the entire vertical range, achieving precise and stable measurements from nanometer to millimeter steps.

主要应用领域

Semiconductor/Compound Semiconductor Photoresist step, etching depth, CMP flatness	MEMS & sensor Microstructure step height, piezoelectric thin film, deep silicon etching
LED & optoelectronics Epitaxial wafer warping, ITO transparent electrode step	solar cell Passivation layer steps, electrode gate line height
Flexible Electronics/Thin Films Thickness of polymer film and warping of PI film	Precision Optics& Automotive Electronics Optical coating steps, structural component contours
Thin film stress analysis 2D/3D stress distribution, Stoney stress calculation	Failure analysis/defect characterization Surface scratch depth and protrusion morphology

产品参数

parameter item	Specifications
Step height range	A few nanometers~1000 µ m
vertical resolution	0.01 Å (sub angstrom level)
Repeatability (1 µ m standard step)	4Å (0.10%)
Constant needle pressure range	0.03 ~ 50mg
Maximum scanning length (X-axis)	150mm (without splicing)
Horizontal resolution X	0.025 µ m/data point
Camera system	5 million pixel color high-definition, supporting pattern recognition
Software features	Step height, roughness, stress analysis (2D/3D), 3D imaging, automatic sequencing SECS/GEM

Selection Guide for KLA Probe Profilometer Series

model	Step range	vertical resolution	Maximum scanning length	Typical Applicable Scenarios
KLA P-7	1nm~1000µm	0.01Å	150mm	Research and development/small-scale production, 6-inch and below wafers
KLA P-17	Sub nanometer~1mm	0.01Å	200mm	High performance research/8-inch compatibility
KLA P-170	Sub nanometer~1mm	0.01Å	300mm	Fully automatic production line/12 inch wafer

Contact engineers for selection suggestions →

实测数据展示

Step height scanning curve and 3D surface morphology imaging on typical semiconductor wafers

客户评价

The KLA P-7 probe based stair step gauge solves the pain point of unstable needle pressure in our front-end stair step gauge. Even when measuring extremely soft photoresist under 0.03mg micro force, there are no scratches, and the repeatability is excellent. The 150mm full-size scan does not require splicing, which significantly improves the efficiency of our 6-inch compound semiconductor wafer warpage monitoring. ”

——Process Integration Manager of an IDM Semiconductor Factory

In terms of cost-effectiveness, the P-7 has a significant advantage among stair treadmills of the same level. Not only is the function of analyzing step height, roughness, and stress very comprehensive, but with the local technical support provided by Nikon, the installation training can be mastered in just half a day. ”

——R&D Director of a well-known MEMS sensor company

Frequently Asked Questions (FAQ)

What is the measurement accuracy of the KLA P-7 probe type step meter? Will it damage the sample?

Vertical resolution of 0.01 Å and repeatability of 4 Å. The minimum constant micro force is 0.03mg, which is non-destructive to photoresist, soft metals, etc., and can safely measure brittle and soft materials.

Can P-7 be used for thin film stress measurement and 2D/3D stress distribution calculation?

Okay. Cooperate with stress chuck to measure warpage changes, with built-in Stoney equation, supporting 2D line scanning and 3D multi-point stress cloud analysis.

Is P-7 suitable for fully automated production line applications? What is the automation capability?

Support fully automatic configuration: pattern recognition, Recipe sequence, and SECS/GEM protocol, suitable for FAB and unmanned workshops.

Can KLA P-7 measure the maximum sample size and irregular samples?

The maximum scanning is 150mm, compatible with circular/square samples of 6 inches and below, and customized fixtures can be used for irregular parts.

What surface analysis standards does Apex software support?

Supports ISO 4287, ASME B46.1, etc., providing analysis of step height, roughness, stress, 3D volume/area, etc.

Free sample testing/appointment demo

Free Sample Testing &On-site Demonstration

You only need to send samples, and we will provide detailed testing reports and analysis recommendations. Book an online/offline demo to experience sub angstrom precision firsthand.

Contact engineers online Message Form Application

*The professional team of Younikon Technology will respond within 24 hours