KLA Profilm3D Optical Profilometer
Non-contact white light interference 3D surface morphology measurement system – sub-nanometer vertical resolution, covering step heights from nanometers to millimeters
<0.1nm Vertical resolution (PSI) | 50nm ~ 10mm Step height range (WLI) | 2mm Single FOV (10x) | 0.05% ~ 100% Sample reflectivity range |
Product Introduction
KLA Profilm3D Optical Profilometer is a non-contact 3D surface morphology measurement system based on white light interferometry (WLI) technology, delivering sub-nanometer surface characterization at a highly competitive price. It integrates two measurement modes: vertical scanning interferometry (WLI) and phase-shifting interferometry (PSI), capable of measuring nano-scale ultra-smooth surface textures, as well as macro-profile analysis of millimeter-level step heights and rough surfaces – truly achieving 3D optical profilometry across scales from nanometers to millimeters.
The latest-generation Profilm3D introduces Enhanced Roughness Imaging (ERM) and TotalFocus™ full-focus 3D imaging technology, solving the pain points of traditional white light interferometers when measuring rough surfaces, high-slope surfaces, and low-reflectivity materials. The Profilm3D series can perform single scans or automated multi-point measurements via simple, flexible program settings, and is widely applicable to various surface morphology measurements – from semiconductor wafer inspection, precision optical component characterization, MEMS device measurement, to biomedical coating analysis.
Technical HighlightsThe Profilm3D measurement vertical resolution does not depend on the numerical aperture of the objective lens, enabling high-resolution measurement with a large field of view simultaneously. Multiple fields of view can be stitched into a complete 3D morphology image via the stitching function. The ERM roughness enhancement mode can measure slopes up to 60° on surfaces, with rough surface signal improvement over 70%.
Why choose Profilm3D? – Six core advantages
Sub-nanometer vertical resolution In PSI mode, RMS repeatability is as low as 0.1nm, and vertical resolution is better than 0.1nm; in WLI mode, RMS repeatability is 1.0nm and step height accuracy is 0.7%. From ultra-smooth optical surfaces to rough engineering surfaces, reliable 3D surface morphology data can be obtained – truly a nanoscale surface morphology measurement device.
Enhanced Roughness Imaging (ERM) Traditional white light interferometers suffer from low interference fringe contrast and poor SNR when measuring rough surfaces. The unique ERM mode of Profilm3D enhances fringe contrast and signal fidelity, enabling measurement of slopes up to 60° on surfaces such as Fresnel lenses. Rough surface signal improvement exceeds 70%, significantly expanding the measurement capability of optical profilometers for rough surfaces.
TotalFocus™ full-focus 3D imaging Profilm3D uses TotalFocus technology to optimize the focus capability of every pixel across the entire measurement range, generating stunning 3D true-color images where every pixel is in focus. Combined with true-color imaging, it presents the actual sample color, enhances visualization, and is especially useful for identifying small or buried features – solving the limited depth-of-field and local blurring issues of traditional profilometers.
Balancing large FOV and optical zoom With just a 10x objective, it provides a maximum FOV of 2mm, while supporting up to 4x optical zoom to meet different magnification needs from panoramic overview to local detail without frequent lens changes. This not only reduces the cost of multiple objectives but also significantly improves measurement efficiency – especially advantageous for large-sample testing tasks.
Wide reflectivity range Profilm3D can measure sample surfaces with reflectivity from as low as 0.05% to as high as 100%, covering low-reflectivity materials from highly reflective metals to nearly black surfaces. This means whether it's polished wafers, metal coatings, carbon fiber composites, or porous silicon films – one device covers all, without switching measurement tools due to material differences.
Cost-effective and easy to operate As an optical profiler enabling sub-nanometer surface morphology research at a lower price, Profilm3D comes standard with a 100mm automatic XY stage, 4-position objective turret, and manual leveling device – meeting most measurement needs without additional accessories. The software interface is intuitive, common roughness parameters and step heights can be obtained in seconds, and it supports automatic stitching and mapping – easy to use from R&D to production.
Typical Applications
The core value of Profilm3D lies in its one-device, multi-surface-type measurement capability. Whether it's smooth optical surfaces like mirrors, rough engineering materials, nanoscale step heights, or millimeter-level macroscopic contours, Profilm3D delivers precise characterization in a single setup. Below are the main application areas and typical measurement scenarios:
| Application Field | Measurement Scenario Description | Typical Measurement Objects |
|---|
| Semiconductor Manufacturing | Wafer surface roughness evaluation, CMP polishing flatness detection, passivation layer step height measurement, photoresist pattern morphology analysis, etching trench depth measurement, BGA solder ball array characterization | Silicon wafer surface roughness, shallow trench isolation depth, step height, CMP pad surface texture |
| MEMS & Microsystems | Morphology and dimension characterization of complex 3D microstructures such as cantilevers, deep trenches, thin-film structures – non-destructive micro-area morphology analysis | Silicon film layer thickness & morphology, micro-cavity depth, AlN/ZnO thin film surface morphology |
| Precision Optics | Surface curvature profile and roughness detection of optical lenses and Fresnel lenses. ERM mode measures slopes up to 60°, solving the measurement challenge of traditional profilometers on steep optical surfaces | Lens surface roughness & curvature, filter morphology, optical coating step height |
| LED & Power Devices | LED chip surface morphology measurement, ITO transparent electrode thickness & uniformity analysis, power device package structure characterization | LED epitaxial layer surface, ITO transparent electrode, package wire bonding marks, lead frame roughness |
| Precision Machining | Precision mold surface quality inspection, mechanical component wear analysis, machining texture characterization, scratch depth quantitative evaluation | Bearing raceway roughness, sealing surface morphology, cutting texture, scratch profile |
| Solar Photovoltaic | Solar cell aluminum grid line width & height measurement, silicon wafer surface roughness monitoring, film uniformity analysis. ERM mode captures low-reflectivity rough texture signals without saturating the photodetector | Al grid 3D morphology, silicon/GaAs substrate roughness, anti-reflective coating surface |
| Biomedical Devices | Medical device surface coating morphology, implant roughness evaluation, biofilm surface analysis. Non-contact measurement is very friendly to sensitive materials such as soft polymers and biological samples | Stent surface coating, catheter coating, orthopedic implant surface, biofilm morphology |
| Automotive Engineering | Brake pad surface roughness assessment, cylinder inner wall wear detection, precision component surface quality control | Brake pad roughness, cylinder wall texture, gear tooth surface morphology |
Measurement Principle
The Profilm3D optical profilometer uses two complementary technologies – White Light Interferometry (WLI) and Phase-Shifting Interferometry (PSI) – for non-contact 3D surface morphology measurement.
White Light Interferometry (WLI) Mode White light is split into two beams by a beam splitter – one beam illuminates the sample surface, the other is directed to an internal reference mirror. The two reflected beams superimpose on a CCD camera to form interference fringes. The system scans along the Z-axis and records the strongest interference signal position for each pixel, determining the relative height of each point on the sample surface, ultimately generating 3D morphology data. WLI mode is suitable for rough surfaces or stepped structures, with a measurement range of 50nm to 10mm.
Phase-Shifting Interferometry (PSI) Mode By precisely controlling the phase shift of the reference mirror, a series of interference images are acquired, and the phase changes of the interference fringes are analyzed to calculate surface height. PSI mode offers higher accuracy, with RMS repeatability as low as 0.1nm, suitable for smooth surface microstructure analysis with a measurement range of 0 to 3μm. Both modes can be flexibly switched on one device, covering measurement needs from rough to smooth, and from nanometer to millimeter.
Product Specifications
| Measurement Technology | WLI + PSI | Light Source | White LED |
| Step Range (WLI) | 50nm – 10mm | Step Range (PSI) | 0 – 3μm |
| RMS Repeatability (WLI) | 1.0nm | RMS Repeatability (PSI) | 0.1nm |
| Step Height Accuracy | 0.7% | Step Height Accuracy | 0.1% |
| Reflectivity Range | 0.05% – 100% | ISO 25178 Compliant | Yes |
| XY Stage | 100mm x 100mm (Profilm3D-200: 200mm x 200mm) | Piezo Scan Range | 500μm |
| Vertical Scan Speed | 12μm/s | Camera | 2592 x 1944 (5 MP) |
| Objective Turret | 4-position automatic | Optical Zoom | Up to 4x |
| Imaging Modes | WLI, PSI, TotalFocus™ full-focus 3D, true-color imaging, ERM |
| Software | Profilm desktop software + Profilm Online® cloud analytics + mobile apps (Android/iOS) |
| For more parameters and custom configurations, please contact us |
Profilm3D vs Profilm3D-200
| Specification | Profilm3D | Profilm3D-200 |
|---|
| XY Stage Range | 100mm x 100mm | 200mm x 200mm |
| Dimensions (W x D x H) | 305mm × 305mm × 550mm | 406mm × 406mm × 550mm |
| Weight | 15kg | 22kg |
| Measurement Performance | Identical (WLI/PSI range, accuracy, imaging modes all same) |
| Applicable Scenarios | Standard lab, semiconductor wafers (≤200mm) | Large samples, large-area stitching |
Optical Profilometer vs Contact Stylus Profiler
| Comparison Dimension | Profilm3D Optical Profilometer | Contact Stylus Profiler |
|---|
| Measurement Method | White light interferometry, non-contact | Stylus contact scanning |
| Sample Damage | Non-destructive, suitable for soft materials and films | May scratch sample surface |
| Measurement Dimension | 3D surface scanning, full morphology | 2D line scan, single profile |
| Vertical Resolution | Sub-nanometer (<0.1nm) | Nanoscale (typically 0.1-1nm) |
| Measurement Speed | Fast, 3D data in seconds | Slow, line-by-line scanning |
| Roughness Analysis | Comprehensive, ISO 25178 compliant | Line roughness only (Ra, Rz, etc.) |
| Sample Preparation | Minimal or none | Sample fixturing required |
Actual Measurement Data
Customer Reviews
"Profilm3D is the most frequently used 3D surface topography measurement device in our lab. It perfectly solves the limitation of our previous stylus profiler that could only perform single-line scanning. Non-contact measurement doesn't damage samples, and a 2mm FOV is achieved with just a 10x objective – very efficient for wafer surface roughness and CMP polishing flatness evaluation. The ERM mode performs even better than expected on low-reflectivity materials. Highly recommended for peers who need surface morphology analysis."
— Process Characterization Lab, Semiconductor Wafer Manufacturer
"In optical lens development, we need to measure the surface microstructure morphology and roughness of Fresnel lenses. Traditional profilometers perform poorly on steep slopes, while Profilm3D's ERM mode can measure slopes up to 60°. Combined with TotalFocus full-focus imaging, every microstructure detail is clearly visible. The device is relatively affordable and easy to operate – very user-friendly for students and beginners."
— Optical Component Testing Group, Precision Optics Research Institute
"Our medical devices require functional coatings on stent and catheter surfaces, typically only a few micrometers thick. Profilm3D's non-contact method allows us to measure step height and surface roughness without damaging the coating, and the sub-nanometer resolution of PSI mode captures even tiny defects on ultra-smooth coating surfaces. The 4x optical zoom function lets one device cover multiple magnification needs – very cost-effective."
— R&D Quality Department, High-end Medical Device Company
Frequently Asked Questions (FAQ)
What types of sample surfaces can Profilm3D measure?
The sample reflectivity range of Profilm3D is 0.05% to 100%, so it can measure materials ranging from highly reflective polished metals and mirrors to nearly black low-reflectivity materials such as carbon fiber, porous silicon, rubber, etc. Whether it's smooth optical surfaces or rough engineering surfaces, Profilm3D flexibly switches between WLI and PSI modes to obtain reliable 3D morphology data.
What is the difference between Profilm3D and a contact stylus profiler?
The core difference lies in measurement dimension and method: a contact stylus profiler uses a probe for 2D line scanning, providing a single profile line, and may scratch soft materials; the Profilm3D optical profilometer uses white light interferometry for non-contact 3D surface scanning, obtaining full surface 3D morphology, roughness, and step height in one measurement without any damage. Profilm3D has significant advantages in data richness, measurement efficiency, and sample protection.
What problem does Profilm3D's Enhanced Roughness Imaging (ERM) solve?
Traditional white light interferometers have low interference fringe contrast and poor SNR when measuring rough surfaces; when measuring high-slope surfaces, reflected light is difficult to return to the optical sensor. ERM mode can measure slopes up to 60° (e.g., Fresnel lenses) and improves rough surface signals by over 70% by enhancing fringe contrast and signal fidelity. This enables Profilm3D to handle low-reflectivity, high-roughness, and steep-slope samples that are difficult for traditional profilometers.
What measurement functions and applications does Profilm3D support?
Profilm3D supports the following core measurement functions: step height measurement (nanometer to millimeter), surface roughness analysis (ISO 25178 compliant), texture and form characterization (waviness, warpage, curvature), edge chamfer 3D contour measurement, defect characterization (3D morphology, defect depth and area), high-resolution scanning of large-area transparent film surfaces, and scratch depth quantitative evaluation. Widely applicable in semiconductors, optics, MEMS, biomedical, automotive, solar, and other industries.
What are the advantages of Profilm3D's TotalFocus imaging technology?
TotalFocus™ technology optimizes the focus capability of every pixel within the entire measurement range, producing stunning 3D true-color images where every pixel is in focus. Unlike ordinary optical profilometers that suffer from blurring in high and low undulating areas due to depth-of-field limitations, TotalFocus ensures that every detail from the highest to the lowest point is clearly visible. Combined with true-color imaging, it presents the actual sample color, enhances visualization, and is especially helpful for identifying small or buried features.
How to choose between Profilm3D and Profilm3D-200?
The measurement performance of the two is completely identical; the only differences are the XY stage range and equipment dimensions: Profilm3D is equipped with a 100mm × 100mm stage, suitable for standard labs and wafers below 200mm; Profilm3D-200 is equipped with a 200mm × 200mm stage, suitable for large samples or applications requiring large-area stitching. If your sample size is usually within 100mm, the standard Profilm3D is fully sufficient.
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Free Sample Testing Service
Not sure if your sample is suitable for Profilm3D optical profilometer measurement? We offer free sample testing! Send us your samples, and our professional engineers will use Profilm3D to perform surface morphology testing, providing you with detailed measurement reports and solution recommendations.
