KLA Zeta-20 white light confocal microscope
Product Introduction of KLA Zeta-20 White Light Confocal Microscope:
KLA Zeta-20White light confocal microscopeBased onZDotIt comes from technology.Zeta-20 White light confocal microscopeImaging analysis can be conducted on most materials and structures, ranging from smooth to high roughness, low reflectivity to high reflectivity surfaces, and transparent to opaque media.KLA Zeta-20White light confocal microscopeAdopting a modular design concept, it provides users with a series of hardware and software options to meet various measurement requirements. All hardware installation and operation are simple and easy to use.
Product features of KLA Zeta-20 white light confocal microscope:
Zeta-20 The white light confocal microscope offers a variety of optical testing techniques to meet the testing needs of users in various fields.
ZDotZDot matrix three-dimensional imaging technology isZetaThe standard technologies of all series of productsZThe unique bright and dark field illumination solution of the dot matrix, combined with different objectives, helps customers measure "difficult" surfaces.
ZICInterference contrast imaging technology enables the imaging and analysis of nano-scale roughness surfaces.
ZSIWhite light differential interferometry technology can achieve a vertical resolution of the angstrom level.
ZI White light interferometry technology, an ideal measurement technique for nanoscale heights under a large field of view.
ZFTReflection spectroscopy film thickness analysis technology, integrated with a wideband reflection spectroscopy analyzer, is measurableULA+ 2et-20The thickness, refractive index and reflectance of thin film materials.
KLA Zeta-20 Product advantages of white light confocal microscope
Repeatability and reproducibility
Contact measurement, suitable for a variety of materials
Micro-force control for measuring soft materials
Trapezoidal distortion correction can significantly reduce the distortion caused by side views
Arc-shaped correction compensates for the arc-shaped movement of the probe
Measurement principle of KLA Zeta-20 white light confocal microscope product:
KLA Zeta-20 White light confocal microscopeThe principle is to achieve the optical sectioning capability of high-resolution and high-contrast samples through the confocal principle. It combines the features of traditional optical microscopes and laser confocal microscopes, using wide-spectrum white light as the light source and eliminating defocusing light interference through spatial filtering mechanisms, thereby achieving high precisionThree-dimensional image.
The main applications of the KLA Zeta-20 white light confocal microscope:
Step height | Texture |
"Appearance" | Stress |
Film thickness | Defect detection |
Product parameters of KLA Zeta-20 White Light confocal Microscope:
| ZDOT | ZI | ZIC | ZSI | ZFT |
Roughness> 40nm | low |
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Roughness< 40nm |
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| low |
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Wide field of viewZDirectional high resolution |
| low |
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15nm-25mmStep height | low |
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5nm-100µmStep height |
| low |
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< 10nm Step height |
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| low |
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Defect: Size < 1µmHeight < 75nm |
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| low | low | low |
Defect: Size > 1µmHeight > 75nm |
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| low |
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30nm<Film and thickness < 15µm |
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Film thickness > 15µm | low |
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Measurement image of KLA Zeta-20 white light confocal microscope:
Automatic defect inspection
Step height
