KLA Zeta-388 optical profilometer

The KLA Zeta-388 optical profilometer is a non-contact three-dimensional surface topography measurement system. This system is based on the Zeta-300 optical profilometer and adds a mechanical arm operating system for fully automatic measurement. The Zeta-388 optical profilometer adopts ZDot technology and a multi-module optical system, capable of measuring a wide variety of samples: including transparent and opaque, low to high reflectivity, smooth to rough surfaces, as well as step heights ranging from sub-nanometer to millimeter. The KLA Zeta-388 optical profilometer supports OCR and SECS/GEM, thus it can be used in the production and manufacturing of fully automatic production lines.

Name：光学轮廓仪

Brand ： KLA

Product model ： Zeta-388

Place of Origin：美国

KLA Zeta-388 Optical profilometer

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Product Introduction of KLA Zeta-388 Optical Profilometer:

KLA Zeta-388Optical profilometerNon-contact three-dimensional surface topography measurement system. This systemZeta-300Based on the optical profilometer, a mechanical arm operating system for fully automatic measurement has been added.Zeta-388Optical profilometer"AdoptZDotThe technology and multi-module optical system can measure various samples: including transparent and opaque, low to high reflectivity, smooth to rough surfaces, as well as step heights from sub-nanometer to millimeter.KLA Zeta-388Optical profilometerSupportOCRandSECS/GEMThus, it can be used in the production and manufacturing of fully automatic production lines.

Product features of KLA Zeta-388 Optical Profilometer:

Fast non-contact three-dimensional optical profilometer
Multi-module optical systems are provided3DScanning, differential interference, film thickness and automatic defect detection
Fully automatic measurement
Simultaneously extract the true color information and topography information on the sample surface
Support100to200mmThe wafer
SupportOCRandSECS/GEMIt is suitable for the production environment of automated production lines
The user interface is simple and intuitive

KLA Zeta-388 The main applications of optical profilometers

Step heights ranging from the nanometer level to the millimeter level can be used for high aspect ratio step measurements
Surface roughness analysis from sub-nanometer to sub-millimeter scale, applicable to both smooth and rough surfaces
ZHigh-resolution white light interferometry can be used for wide-area step height measurement
Phase-shifting scanning interferometry can quickly measure less than250nmThe height of the steps
Measurement of film stress and sample warpage
Measurement30nmto100mumThe thickness of the transparent film can be provided, along with film uniformity data and film thickness distribution maps
Automatic defect detection, capable of identifying lateral dimensions greater than1mumDefects

Measurement principle of KLA Zeta-388 optical profilometer product:

KLA Zeta-388 Optical profilometer‌The principle‌It is the optical sectioning capability of high-resolution and high-contrast samples achieved through the confocal principle. It combines the features of traditional optical microscopes and laser confocal microscopes, using wide-spectrum white light as the light source and eliminating defocusing light interference through spatial filtering mechanisms, thereby obtaining high-precision three-dimensional images

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