KLA P-7 probe-type step gauge
Product Introduction of KLA P-7 Probe-type Step Gauge:
KLA P-7 probe-type step gaugeIt is the probe-type step gauge system of KLA Company.KLA P-7 probe-type surface profilometerEstablished onP-17 Desktop probe Profile Analysis SystemBased on its success. It retains the measurement performance of the P-17 technology and offers cost-effectiveness as a benchtop probe profilometer platform. The KLA P-7 probe-type step meter can perform 2D and 3D measurements of step height, roughness, warpage and stress, and its scanning can reach 150mm without image stitching.
In terms of reliability performance, the KLA P-7 probe-type step meter has the performance of good measurement repeatability. UltraLite sensors feature dynamic force control, excellent linearity, and good vertical resolution, among other characteristics. The friendly user interface and automated measurement can be adapted to different application scenarios such as universities, research and development, and production.
Product features of KLA P-7 probe-type step gauge:
Step height: A few nanometers to 1000µm. Flat scanning platform
Micro-force constant force control :0.03 to 50mg
Full-diameter scanning of the sample is required without image stitching
Video: 5-megapixel high-resolution color camera
Arc correction: Clear the errors caused by the arc-shaped movement of the probe
Production capacity: Fully automated through sequencing, pattern recognition and SECS/GEM
Measurement principle of KLA P-7 probe-type step meter:
KLA P-7 probe stepThe instrument adopts LVDC sensor technology. The LVDC sensor tracks the surface terrain by utilizing changes in capacitance. The capacitance change is caused by the movement of a thin metal sensor blade moving between two capacitive plates. When the probe tracks the surface, the position of the sensor blade changes, which causes a change in capacitance. Then, the capacitance change is converted into a terrain signal. The advantage of LVDC design is its small mass and linear motion of the blades, thereby reducing hysteresis and friction to a very low level. This design enables precise, stable and high-resolution measurements throughout the entire vertical range.
The main applications of KLA P-7 probe-type step gauge:
Film/thick film steps | Measurement of etching depth |
Photoresist/photoresist step | Flexible film |
2Dstress measurement of thin films | Surface structure analysis |
Characterization of surface roughness/flatness | Surface curvature and contour analysis |
3D contour imaging of the surface | Defect characterization and defect analysis |
Other multiple surface analysis functions |
Product Features and expansion options of KLA P-7 Probe Step:
Probe scanning
The scanning platform features a scanning range of 150mm and a maximum scanning height range of 1mm, ensuring high-quality 2D and 3D scanning data.
Step repeatability
The repeatability at a height of 1 micrometer is 0.4 nanometers. This is attributed to extremely low-noise electronic components, capacitive sensors with sub-anglia resolution, and a highly flat flat crystal base.
Apex software
The Apex analysis software enhances the standard data analysis capabilities of the KLA P-7 probe-type steps by providing an extension suite of leveling, filtering, step height, roughness and surface topography analysis techniques. Apex supports ISO roughness calculation methods as well as local standards such as ASME Apex can also be used as a report writing platform, featuring the addition of text, annotations, and yes/no criteria. Apex offers versions in eight languages.
Automated measurement
Automated measurement, including pattern recognition, 1000 sequencing column points and sequence queue functions, can increase production. The combination of pattern recognition and automatic calibration can reduce platform positioning errors and achieve seamless transmission of formulas between systems. After being fully integrated with automated measurement, feature detection, feature discovery and Apex software, the functions of automated data collection and reporting can be realized.
3D imaging
Three-dimensional imaging of the surface can be obtained through 3D scanning, presenting a color three-dimensional image or a contour image from top to bottom. Three-dimensional or two-dimensional data in the cross-section/line can be extracted from it.
Stress analysis
It is capable of measuring the stress generated during the production of semiconductor devices that contain multiple process layers. Support the sample in a neutral position using a stress chuck and measure the warpage of the sample in detail. Then calculate the stress by applying the Stoney equation. 2D stress is measured by a single scan on a sample with a diameter of up to 150mm without the need for image stitching. The measurement of 3D stress employs multiple 2D scans and combines the rotation of the θ platform between scans to measure the entire sample surface.
Offline analysis software
Offline software can create scans and sequence formulas, as well as analyze Profiler or Apex data.
Product parameters of KLA P-7 probe-type step gauge:
Repeatability | 4 a (0.10%) | Vertical resolution | 0.01 A | Vertical range | 1200µm |
Needle pressure range | 0.03 ~ 50 mg | Horizontal resolution (X) : | 0.025 (including m | Horizontal resolution (Y) : | 0.5 (including m |
For more parameters, please contact us |
Measurement diagram of KLA P-7 probe-type step gauge:
